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水中溶解气体对兆声清洗中晶圆清洗关注的 0.83MHz 声空化和气泡生长速率的影响。

Effect of dissolved gases in water on acoustic cavitation and bubble growth rate in 0.83 MHz megasonic of interest to wafer cleaning.

机构信息

Department of Materials Engineering, Hanyang University, Ansan 426-791, Republic of Korea.

Department of Materials Engineering, Hanyang University, Ansan 426-791, Republic of Korea.

出版信息

Ultrason Sonochem. 2014 Jul;21(4):1496-503. doi: 10.1016/j.ultsonch.2014.01.012. Epub 2014 Feb 6.

DOI:10.1016/j.ultsonch.2014.01.012
PMID:24529613
Abstract

Changes in the cavitation intensity of gases dissolved in water, including H2, N2, and Ar, have been established in studies of acoustic bubble growth rates under ultrasonic fields. Variations in the acoustic properties of dissolved gases in water affect the cavitation intensity at a high frequency (0.83 MHz) due to changes in the rectified diffusion and bubble coalescence rate. It has been proposed that acoustic bubble growth rates rapidly increase when water contains a gas, such as hydrogen faster single bubble growth due to rectified diffusion, and a higher rate of coalescence under Bjerknes forces. The change of acoustic bubble growth rate in rectified diffusion has an effect on the damping constant and diffusivity of gas at the acoustic bubble and liquid interface. It has been suggested that the coalescence reaction of bubbles under Bjerknes forces is a reaction determined by the compressibility and density of dissolved gas in water associated with sound velocity and density in acoustic bubbles. High acoustic bubble growth rates also contribute to enhanced cavitation effects in terms of dissolved gas in water. On the other hand, when Ar gas dissolves into water under ultrasound field, cavitation behavior was reduced remarkably due to its lower acoustic bubble growth rate. It is shown that change of cavitation intensity in various dissolved gases were verified through cleaning experiments in the single type of cleaning tool such as particle removal and pattern damage based on numerically calculated acoustic bubble growth rates.

摘要

在超声场下研究了气体(包括 H2、N2 和 Ar)的空化强度在水中的变化,确立了溶解气体的空化强度变化。由于整流扩散和气泡聚并速率的变化,水中溶解气体的声特性变化会影响高频(0.83MHz)下的空化强度。有人提出,当水中存在气体(如氢气)时,由于整流扩散作用,声空化气泡的生长速率会迅速增加,而在 Bjerknes 力作用下,聚并速率也会提高。整流扩散中声空化气泡生长速率的变化会影响气-液界面处气体的阻尼常数和扩散率。有人认为,Bjerknes 力作用下气泡的聚并反应是一种由水中溶解气体的可压缩性和密度决定的反应,与声速和气泡中的密度有关。高的声空化气泡生长速率也会增强水中溶解气体的空化效应。另一方面,当 Ar 气体在超声场中溶解于水中时,由于其较低的空化气泡生长速率,空化行为显著减少。结果表明,通过基于数值计算的声空化气泡生长速率,在单一类型的清洗工具(如颗粒去除和图案损伤)的清洗实验中,验证了各种溶解气体的空化强度变化。

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