Fox O J L, Alianelli L, Malik A M, Pape I, May P W, Sawhney K J S
Opt Express. 2014 Apr 7;22(7):7657-68. doi: 10.1364/OE.22.007657.
Diamond possesses many extreme properties that make it an ideal material for fabricating nanofocusing x-ray optics. Refractive lenses made from diamond are able to focus x-ray radiation with high efficiency but without compromising the brilliance of the beam. Electron-beam lithography and deep reactive-ion etching of silicon substrates have been used in a transfer-molding technique to fabricate diamond optics with vertical and smooth sidewalls. Latest generation compound refractive lenses have seen an improvement in the quality and uniformity of the optical structures, resulting in an increase in their focusing ability. Synchrotron beamline tests of two recent lens arrays, corresponding to two different diamond morphologies, are described. Focal line-widths down to 210 nm, using a nanocrystalline diamond lens array and a beam energy of E = 11 keV, and 230 nm, using a microcrystalline diamond lens at E = 15 keV, have been measured using the Diamond Light Source Ltd. B16 beamline. This focusing prowess is combined with relatively high transmission through the lenses compared with silicon refractive designs and other diffractive optics.
金刚石具有许多极端特性，使其成为制造纳米聚焦X射线光学器件的理想材料。由金刚石制成的折射透镜能够高效聚焦X射线辐射，同时又不影响光束的亮度。在一种转印成型技术中，已采用电子束光刻和硅基片的深反应离子蚀刻来制造具有垂直且光滑侧壁的金刚石光学器件。最新一代的复合折射透镜在光学结构的质量和均匀性方面已有改进，从而提高了它们的聚焦能力。本文描述了对应于两种不同金刚石形态的两个最近透镜阵列的同步加速器光束线测试。使用金刚石光源有限公司的B16光束线测量到，使用纳米晶金刚石透镜阵列且束流能量E = 11 keV时，焦线宽度低至210 nm；使用微晶金刚石透镜且E = 15 keV时，焦线宽度为230 nm。与硅折射设计和其他衍射光学器件相比，这种聚焦能力与通过透镜的相对较高的透射率相结合。
