采用平面蚀刻技术制造的金刚石纳米聚焦折射X射线透镜。
Diamond nanofocusing refractive X-ray lenses made by planar etching technology.
作者信息
Lyubomirskiy Mikhail, Boye Pit, Feldkamp Jan M, Patommel Jens, Schoeder Sebastian, Schropp Andreas, Burghammer Manfred, Wild Christoph, Schroer Christian G
机构信息
Deutsches Elektronen-Synchrotron DESY, Notkestraße 85, 22607 Hamburg, Germany.
Institute of Structural Physics, TU Dresden, Zellescher Weg 16, 01069 Dresden, Germany.
出版信息
J Synchrotron Radiat. 2019 Sep 1;26(Pt 5):1554-1557. doi: 10.1107/S1600577519007082. Epub 2019 Aug 1.
The manufacturing steps and first tests of a refractive lens made of polycrystalline diamond are described. A fabrication process based on electron-beam lithography and deep reactive ion etching is introduced. Experimental tests on beamline ID13 at the ESRF have been performed. A spot size of 360 nm (FWHM) at an energy E = 24.3 keV is observed.
描述了由多晶体制成的折射透镜的制造步骤和首次测试。介绍了一种基于电子束光刻和深反应离子刻蚀的制造工艺。在欧洲同步辐射装置的ID13光束线上进行了实验测试。在能量E = 24.3 keV时观察到光斑尺寸为360 nm（半高宽）。
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