Lyubomirskiy Mikhail, Schurink Bart, Makhotkin Igor A, Brueckner Dennis, Wittwer Felix, Kahnt Maik, Seyrich Martin, Seiboth Frank, Bijkerk Fred, Schroer Christian G
Opt Express. 2021 Apr 26;29(9):14025-14032. doi: 10.1364/OE.416223.
We report on the manufacturing and testing of the first nanofocusing refractive lenses made of single-crystal silicon carbide. We introduce the fabrication process based on lithography, followed by deep isotropic etching. The lenses were characterized at the energy of 12 keV at the beamline P06 of the synchrotron radiation source PETRA III. A focal spot of 186 nm×275 nm has been achieved with a lens working distance of 29 mm.
我们报告了首批由碳化硅单晶制成的纳米聚焦折射透镜的制造与测试情况。我们介绍了基于光刻技术、随后进行深各向同性蚀刻的制造工艺。这些透镜在同步辐射源PETRA III的光束线P06上于12 keV能量下进行了表征。在透镜工作距离为29 mm时实现了186 nm×275 nm的焦斑。
