Park Yong Seob, Choi Won Seek, Yi Junsin, Lee Jaehyeong
J Nanosci Nanotechnol. 2014 May;14(5):3872-5. doi: 10.1166/jnn.2014.7868.
Anodic Aluminum Oxide (AAO) template prepared in acid electrolyte possess regular and highly anisotropic porous structure with pore diameter range from five to several hundred nanometers, and with a density of pores ranging from 10(9) to 10(11) cm(-2). AAO can be used as microfilters and templates for the growth of CNTs and metal or semiconductor nanowires. Varying anodizing conditions such as temperature, electrolyte, applied voltage, anodizing and widening time, one can control the diameter, the length, and the density of pores. In this work, we deposited Al thin film by radio frequency magnetron sputtering method to fabricate AAO nano template and synthesized multi-well carbon nanotubes on a glass substrate by microwave plasma-enhanced chemical vapor deposition (MPECVD). AAO nano-porous templates with various pore sizes and depths were introduced to control the dimension and density of CNT arrays. The AAO nano template was synthesize on glass by two-step anodization technique. The average diameter and interpore distance of AAO nano template are about 65 nm and 82 nm. The pore density and AAO nano template thickness are about 2.1 x 10(10) pores/cm2 and 1 microm, respectively. Aligned CNTs on the AAO nano template were synthesized by MPECVD at 650 degrees C with the Ni catalyst layer. The length and diameter of CNTs were grown 2 microm and 50 nm, respectively.
在酸性电解质中制备的阳极氧化铝（AAO）模板具有规则且高度各向异性的多孔结构，孔径范围为5至数百纳米，孔密度范围为10⁹至10¹¹ cm⁻²。AAO可用作微滤器以及用于碳纳米管（CNT）和金属或半导体纳米线生长的模板。通过改变诸如温度、电解质、施加电压、阳极氧化和扩孔时间等阳极氧化条件，可以控制孔的直径、长度和密度。在这项工作中，我们通过射频磁控溅射法沉积铝薄膜以制备AAO纳米模板，并通过微波等离子体增强化学气相沉积（MPECVD）在玻璃基板上合成了多阱碳纳米管。引入具有各种孔径和深度的AAO纳米多孔模板以控制CNT阵列的尺寸和密度。通过两步阳极氧化技术在玻璃上合成AAO纳米模板。AAO纳米模板的平均直径和孔间距分别约为65 nm和82 nm。孔密度和AAO纳米模板厚度分别约为2.1×10¹⁰个孔/cm²和1μm。在650℃下利用Ni催化剂层通过MPECVD在AAO纳米模板上合成了排列整齐的CNT。CNT的长度和直径分别生长到2μm和五十纳米。
