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铝掺杂氧化锌薄膜的半导体特性

Semiconducting properties of Al doped ZnO thin films.

作者信息

Al-Ghamdi Ahmed A, Al-Hartomy Omar A, El Okr M, Nawar A M, El-Gazzar S, El-Tantawy Farid, Yakuphanoglu F

机构信息

Physics Department, Faculty of Science, King Abdulaziz University, Jeddah, Saudi Arabia.

Physics Department, Faculty of Science, King Abdulaziz University, Jeddah, Saudi Arabia; Department of Physics, Faculty of Science, Tabuk University, Tabuk 71491, Saudi Arabia.

出版信息

Spectrochim Acta A Mol Biomol Spectrosc. 2014 Oct 15;131:512-7. doi: 10.1016/j.saa.2014.04.020. Epub 2014 Apr 18.

Abstract

Aluminum doped ZnO (AZO) thin films were successfully deposited via spin coating technique onto glass substrates. Structural properties of the films were analyzed by X-ray diffraction, atomic force microscopy (AFM) and energy dispersive X-ray spectroscopy. X-ray diffraction results reveal that all the films are polycrystalline with a hexagonal wurtzite structure with a preferential orientation according to the direction (002) plane. The crystallite size of ZnO and AZO films was determined from Scherrer's formula and Williamson-Hall analysis. The lattice parameters of the AZO films were found to decrease with increasing Al content. Energy dispersive spectroscopy (EDX) results indicate that Zn, Al and O elements are present in the AZO thin films. The electrical conductivity, mobility carriers and carrier concentration of the films are increased with increasing Al doping concentration. The optical band gap (Eg) of the films is increased with increasing Al concentration. The AZO thin films indicate a high transparency in the visible region with an average value of 86%. These transparent AZO films may be open a new avenue for optoelectronic and photonic devices applications in near future.

摘要

通过旋涂技术成功地在玻璃基板上沉积了铝掺杂氧化锌(AZO)薄膜。通过X射线衍射、原子力显微镜(AFM)和能量色散X射线光谱对薄膜的结构特性进行了分析。X射线衍射结果表明,所有薄膜均为具有六方纤锌矿结构的多晶,且根据(002)面方向具有择优取向。根据谢乐公式和威廉姆森-霍尔分析确定了ZnO和AZO薄膜的晶粒尺寸。发现AZO薄膜的晶格参数随Al含量的增加而减小。能量色散光谱(EDX)结果表明,AZO薄膜中存在Zn、Al和O元素。薄膜的电导率、迁移载流子和载流子浓度随Al掺杂浓度的增加而增加。薄膜的光学带隙(Eg)随Al浓度的增加而增加。AZO薄膜在可见光区域显示出高透明度,平均值为86%。这些透明的AZO薄膜可能在不久的将来为光电子和光子器件应用开辟一条新途径。

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