Nuryadi Ratno, Aprilia Lia, Hosoda Makoto, Barique Mohamad Abdul, Udhiarto Arief, Hartanto Djoko, Setiawan Muhammad Budi, Neo Yoichiro, Mimura Hidenori
Center for Materials Technology, Agency for the Assessment and Application of Technology, Puspiptek Building #224, South Tangerang, Banten 15314, Indonesia.
Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Shizuoka, Japan.
Sensors (Basel). 2020 Apr 3;20(7):2013. doi: 10.3390/s20072013.
An oscillating piezoresistive microcantilever (MC) coated with an aluminum (Al)-doped zinc oxide (ZnO) nanorods was used to detect carbon monoxide (CO) in air at room temperature. Al-doped ZnO nanorods were grown on the MC surface using the hydrothermal method, and a response to CO gas was observed by measuring a resonant frequency shift of vibrated MC. CO gas response showed a significant increase in resonant frequency, where sensitivity in the order of picogram amounts was obtained. An increase in resonant frequency was also observed with increasing gas flow rate, which was simultaneously followed by a decrease in relative humidity, indicating that the molecular interface between ZnO and HO plays a key role in CO absorption. The detection of other gases of carbon compounds such as CO and CH was also performed; the sensitivity of CO was found to be higher than those gases. The results demonstrate the reversibility and reproducibility of the proposed technique, opening up future developments of highly sensitive CO-gas detectors with a fast response and room temperature operation.
一种涂覆有铝（Al）掺杂氧化锌（ZnO）纳米棒的振荡压阻微悬臂梁（MC）被用于在室温下检测空气中的一氧化碳（CO）。采用水热法在MC表面生长Al掺杂的ZnO纳米棒，并通过测量振动MC的共振频率偏移来观察对CO气体的响应。CO气体响应显示共振频率显著增加，获得了皮克量级的灵敏度。随着气体流速增加也观察到共振频率增加，同时相对湿度降低，这表明ZnO与H₂O之间的分子界面在CO吸收中起关键作用。还对其他碳化合物气体如CO₂和CH₄进行了检测；发现CO的灵敏度高于那些气体。结果证明了所提出技术的可逆性和可重复性，为具有快速响应和室温操作的高灵敏度CO气体探测器的未来发展开辟了道路。
