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利用电子束诱导电流显微镜对核壳型线状发光二极管传输特性进行的实验与理论分析。

Experimental and theoretical analysis of transport properties of core-shell wire light emitting diodes probed by electron beam induced current microscopy.

作者信息

Lavenus P, Messanvi A, Rigutti L, De Luna Bugallo A, Zhang H, Bayle F, Julien F H, Eymery J, Durand C, Tchernycheva M

机构信息

Institut d'Electronique Fondamentale, UMR 8622 CNRS, Université Paris Sud XI, 91405 Orsay cedex, France.

出版信息

Nanotechnology. 2014 Jun 27;25(25):255201. doi: 10.1088/0957-4484/25/25/255201. Epub 2014 Jun 4.

DOI:10.1088/0957-4484/25/25/255201
PMID:24897006
Abstract

We report a systematic experimental and theoretical investigation of core-shell InGaN/GaN single wire light-emitting diodes (LEDs) using electron beam induced current (EBIC) microscopy. The wires were grown by catalyst-free MOVPE and processed into single wire LEDs using electron beam lithography on dispersed wires. The influence of the acceleration voltage and of the applied bias on the EBIC maps was investigated. We show that the EBIC maps provide information both on the minority carrier effects (i.e. on the local p-n junction collection efficiency) and on the majority carrier effects (i.e. the transport efficiency from the excited region toward the contacts). Because of a finite core and shell resistance a non-negligible current redistribution into the p-n junction takes place during the majority carrier transport. A theoretical model for transport in a core-shell wire is developed, allowing to explain the dependence of the EBIC profiles on the experimental parameters (the electron beam acceleration voltage and the bias applied on the device) and on the structural parameters of the wire (core and shell resistance, shunt resistance, etc). Comparison between simulated and experimental profiles provides valuable information concerning the structure inhomogeneities and gives insight into the wire electrical parameters.

摘要

我们报告了一项利用电子束诱导电流(EBIC)显微镜对核壳结构InGaN/GaN单丝发光二极管(LED)进行的系统实验和理论研究。这些单丝通过无催化剂金属有机气相外延(MOVPE)生长,并在分散的单丝上使用电子束光刻技术加工成单丝LED。研究了加速电压和外加偏压对EBIC图谱的影响。我们表明,EBIC图谱既提供了关于少数载流子效应(即局部p-n结收集效率)的信息,也提供了关于多数载流子效应(即从激发区向接触点的传输效率)的信息。由于核和壳存在有限电阻,在多数载流子传输过程中,会发生不可忽略的电流重新分布进入p-n结。我们建立了一个核壳单丝中载流子传输的理论模型,该模型能够解释EBIC轮廓对实验参数(电子束加速电压和施加在器件上的偏压)以及单丝结构参数(核电阻、壳电阻、并联电阻等)的依赖性。模拟轮廓与实验轮廓之间的比较提供了有关结构不均匀性的有价值信息,并深入了解了单丝的电学参数。

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