Suppr超能文献

直接成像核壳 GaN 线中的 p-n 结。

Direct imaging of p-n junction in core-shell GaN wires.

机构信息

Univ. Grenoble Alpes , F-38000 Grenoble, France.

出版信息

Nano Lett. 2014 Jun 11;14(6):3491-8. doi: 10.1021/nl5010493. Epub 2014 May 29.

Abstract

While core-shell wire-based devices offer a promising path toward improved optoelectronic applications, their development is hampered by the present uncertainty about essential semiconductor properties along the three-dimensional (3D) buried p-n junction. Thanks to a cross-sectional approach, scanning electron beam probing techniques were employed here to obtain a nanoscale spatially resolved analysis of GaN core-shell wire p-n junctions grown by catalyst-free metal-organic vapor phase epitaxy on GaN and Si substrates. Both electron beam induced current (EBIC) and secondary electron voltage constrast (VC) were demonstrated to delineate the radial and axial junction existing in the 3D structure. The Mg dopant activation process in p-GaN shell was dynamically controlled by the ebeam exposure conditions and visualized thanks to EBIC mapping. EBIC measurements were shown to yield local minority carrier/exciton diffusion lengths on the p-side (∼57 nm) and the n-side (∼15 nm) as well as depletion width in the range 40-50 nm. Under reverse bias conditions, VC imaging provided electrostatic potential maps in the vicinity of the 3D junction from which acceptor Na and donor Nd doping levels were locally determined to be Na = 3 × 10(18) cm(-3) and Nd = 3.5 × 10(18) cm(-3) in both the axial and the radial junction. Results from EBIC and VC are in good agreement. This nanoscale approach provides essential guidance to the further development of core-shell wire devices.

摘要

虽然核壳线基器件为改进光电应用提供了有前途的途径,但由于目前沿三维(3D)埋置 p-n 结的基本半导体性质存在不确定性,其发展受到了阻碍。借助横截面方法,这里采用扫描电子束探测技术对在 GaN 和 Si 衬底上无催化剂的金属有机气相外延生长的 GaN 核壳线 p-n 结进行了纳米尺度空间分辨分析。电子束诱导电流(EBIC)和二次电子电压对比(VC)都被证明可以描绘 3D 结构中存在的径向和轴向结。p-GaN 壳中的 Mg 掺杂剂激活过程通过 ebeam 暴露条件进行动态控制,并通过 EBIC 映射进行可视化。EBIC 测量结果表明,在 p 侧(∼57nm)和 n 侧(∼15nm)上获得了局部少子/激子扩散长度,以及在 40-50nm 范围内的耗尽宽度。在反向偏置条件下,VC 成像在 3D 结附近提供了静电势图,从中可以局部确定受主 Na 和施主 Nd 掺杂水平,轴向和径向结中 Na = 3×10(18)cm(-3)和 Nd = 3.5×10(18)cm(-3)。EBIC 和 VC 的结果非常吻合。这种纳米级方法为核壳线器件的进一步发展提供了重要指导。

文献AI研究员

20分钟写一篇综述,助力文献阅读效率提升50倍。

立即体验

用中文搜PubMed

大模型驱动的PubMed中文搜索引擎

马上搜索

文档翻译

学术文献翻译模型,支持多种主流文档格式。

立即体验