通过激光共聚焦技术进行半径测量。

Radius measurement by laser confocal technology.

作者信息

Yang Jiamiao, Qiu Lirong, Zhao Weiqian, Zhang Xin, Wang Xu

出版信息

Appl Opt. 2014 May 1;53(13):2860-5. doi: 10.1364/AO.53.002860.

DOI:10.1364/AO.53.002860

Abstract

A laser confocal radius measurement (LCRM) method is proposed for high-accuracy measurement of the radius of curvature (ROC). The LCRM uses the peak points of confocal response curves to identify the cat eye and confocal positions precisely. It then accurately measures the distance between these two positions to determine the ROC. The LCRM also uses conic fitting, which significantly enhances measurement accuracy by restraining the influences of environmental disturbance and system noise on the measurement results. The experimental results indicate that LCRM has a relative expanded uncertainty of less than 10 ppm for both convex and concave spheres. Thus, LCRM is a feasible method for ROC measurements with high accuracy and concise structures.

摘要

提出了一种用于高精度测量曲率半径（ROC）的激光共焦半径测量（LCRM）方法。LCRM利用共焦响应曲线的峰值点精确识别猫眼和共焦位置。然后，它精确测量这两个位置之间的距离以确定ROC。LCRM还采用了圆锥拟合，通过抑制环境干扰和系统噪声对测量结果的影响，显著提高了测量精度。实验结果表明，对于凸面和凹面球体，LCRM的相对扩展不确定度均小于10 ppm。因此，LCRM是一种用于ROC测量的可行方法，具有高精度和简洁的结构。