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通过纳秒和飞秒脉冲激光沉积法制备Cu(In,Ga)Se2薄膜及其特性研究

Growth and characterization of Cu(In,Ga)Se2 thin films by nanosecond and femtosecond pulsed laser deposition.

作者信息

Chen Shih-Chen, Hsieh Dan-Hua, Jiang Hsin, Liao Yu-Kuang, Lai Fang-I, Chen Chyong-Hua, Luo Chih Wei, Juang Jenh-Yih, Chueh Yu-Lun, Wu Kaung-Hsiung, Kuo Hao-Chung

机构信息

Department of Electrophysics, National Chiao-Tung University, Hsinchu 30010, Taiwan.

Department of Photonics and Institute of Electro-Optical Engineering, National Chiao-Tung University, Hsinchu 30010, Taiwan.

出版信息

Nanoscale Res Lett. 2014 Jun 2;9(1):280. doi: 10.1186/1556-276X-9-280. eCollection 2014.

DOI:10.1186/1556-276X-9-280
PMID:24959108
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC4059471/
Abstract

In this work, CuIn1 - x Ga x Se2 (CIGS) thin films were prepared by nanosecond (ns)- and femtosecond (fs)-pulsed laser deposition (PLD) processes. Different film growth mechanisms were discussed in perspective of the laser-produced plasmas and crystal structures. The fs-PLD has successfully improved the inherent flaws, Cu2 - x Se, and air voids ubiquitously observed in ns-PLD-derived CIGS thin films. Moreover, the prominent antireflection and excellent crystalline structures were obtained in the fs-PLD-derived CIGS thin films. The absorption spectra suggest the divergence in energy levels of radiative defects brought by the inhomogeneous distribution of elements in the fs-PLD CIGS, which has also been supported by comparing photoluminescence (PL) spectra of ns- and fs-PLD CIGS thin films at 15 K. Finally, the superior carrier transport properties in fs-PLD CIGS were confirmed by fs pump-probe spectroscopy and four-probe measurements. The present results indicate a promising way for preparing high-quality CIGS thin films via fs-PLD.

摘要

在本工作中，通过纳秒（ns）和飞秒（fs）脉冲激光沉积（PLD）工艺制备了铜铟镓硒（CuIn1 - x Ga x Se2，CIGS）薄膜。从激光产生的等离子体和晶体结构的角度讨论了不同的薄膜生长机制。飞秒脉冲激光沉积成功改善了在纳秒脉冲激光沉积法制备的CIGS薄膜中普遍观察到的固有缺陷Cu2 - x Se和气孔。此外，飞秒脉冲激光沉积法制备的CIGS薄膜具有显著的减反射特性和优异的晶体结构。吸收光谱表明，飞秒脉冲激光沉积CIGS中元素的不均匀分布导致了辐射缺陷能级的差异，这也通过比较15 K下纳秒和飞秒脉冲激光沉积CIGS薄膜的光致发光（PL）光谱得到了证实。最后，通过飞秒泵浦 - 探测光谱和四探针测量证实了飞秒脉冲激光沉积CIGS具有优异的载流子传输特性。目前的结果表明，通过飞秒脉冲激光沉积制备高质量CIGS薄膜是一种很有前景的方法。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/718c/4059471/d6b5327cbbe5/1556-276X-9-280-5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/718c/4059471/457bc914478a/1556-276X-9-280-1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/718c/4059471/a38ca4c76a91/1556-276X-9-280-2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/718c/4059471/f2374ef8a4b8/1556-276X-9-280-3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/718c/4059471/91a4acd769f0/1556-276X-9-280-4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/718c/4059471/d6b5327cbbe5/1556-276X-9-280-5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/718c/4059471/457bc914478a/1556-276X-9-280-1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/718c/4059471/a38ca4c76a91/1556-276X-9-280-2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/718c/4059471/f2374ef8a4b8/1556-276X-9-280-3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/718c/4059471/91a4acd769f0/1556-276X-9-280-4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/718c/4059471/d6b5327cbbe5/1556-276X-9-280-5.jpg

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