通过聚苯乙烯的应变恢复变形和氧反应离子蚀刻制备超疏水微通道

Chakraborty Anirban, Xiang Mingming, Luo Cheng

Department of Mechanical and Aerospace Engineering, University of Texas, Arlington, TX 76019, USA.

Materials (Basel). 2013 Aug 19;6(8):3610-3623. doi: 10.3390/ma6083610.

In this article, we report a simple approach to generate micropillars (whose top portions are covered by sub-micron wrinkles) on the inner surfaces of polystyrene (PS) microchannels, as well as on the top surface of the PS substrate, based on strain-recovery deformations of the PS and oxygen reactive ion etch (ORIE). Using this approach, two types of micropillar-covered microchannels are fabricated. Their widths range from 118 μm to 132 μm, depths vary from 40 μm to 44 μm, and the inclined angles of their sidewalls are from 53° to 64°. The micropillars enable these microchannels to have super-hydrophobic properties. The contact angles observed on the channel-structured surfaces are above 162°, and the tilt angles to make water drops roll off from these channel-structured substrates can be as small as 1°.

在本文中，我们报道了一种基于聚苯乙烯（PS）的应变恢复变形和氧反应离子蚀刻（ORIE），在聚苯乙烯（PS）微通道内表面以及PS基板顶面上生成微柱（其顶部覆盖有亚微米皱纹）的简单方法。使用这种方法，制造了两种类型的微柱覆盖微通道。它们的宽度范围为118μm至132μm，深度从40μm到44μm不等，其侧壁的倾斜角度为53°至64°。这些微柱使这些微通道具有超疏水性能。在通道结构表面上观察到的接触角大于162°，使水滴从这些通道结构基板滚落的倾斜角可小至1°。