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硅衬底上同质外延生长的 InGaAs/GaAs 核壳纳米柱的成分均匀性。

Composition homogeneity in InGaAs/GaAs core-shell nanopillars monolithically grown on silicon.

机构信息

Department of Electrical Engineering and Computer Sciences, University of California at Berkeley , Berkeley, California 94720, United States.

出版信息

ACS Appl Mater Interfaces. 2014 Oct 8;6(19):16706-11. doi: 10.1021/am503676c. Epub 2014 Sep 26.

Abstract

Alloy composition homogeneity plays an important role in the device performance of III-V heterostructures. In this work, we study the spatial composition uniformity of n-In0.12Ga0.88As/i-In0.2Ga0.8As/p-GaAs core-shell nanopillars monolithically grown on silicon. Cross sections extracted along the axial and radial directions are examined with transmission electron microscopy and energy-dispersive X-ray spectroscopy. Interestingly, indium-deficient segments with width ∼5 nm are observed to develop along the radial ⟨112̅0⟩ directions in the InGaAs layers. We attribute this spontaneous ordering to capillarity effect and difference in group-III adatom diffusion lengths. The slight fluctuation in indium content (∼4%), however, does not induce any noticeable misfit defects in the pure wurtzite-phased crystal. In contrast, the heterostructure exhibits excellent alloy composition uniformity along the axial [0001] direction. Furthermore, abrupt transitions of gallium and indium are seen at the heterointerfaces. These remarkable properties give rise to extraordinary optical performances. Lasing is achieved in the core-shell nanopillars upon optical pump despite the observed alloy composition fluctuation in the radial directions. The results here reveal the potential of the InGaAs-based core-shell heterostructures as efficient optoelectronic devices and high-speed heterojunction transistors directly integrated on silicon.

摘要

合金成分的均匀性对 III-V 异质结构器件的性能起着重要作用。在这项工作中,我们研究了硅衬底上外延生长的 n-In0.12Ga0.88As/i-In0.2Ga0.8As/p-GaAs 核壳纳米柱的空间成分均匀性。利用透射电子显微镜和能量色散 X 射线光谱法对沿轴向和径向提取的截面进行了研究。有趣的是,在 InGaAs 层中沿 ⟨112̅0⟩径向方向观察到了宽度约为 5nm 的铟缺乏段。我们将这种自发有序归因于毛细作用和 III 族原子扩散长度的差异。然而,铟含量的轻微波动(约 4%)不会在纯纤锌矿相晶体中引起任何明显的失配位错。相比之下,异质结构沿轴向 [0001] 方向表现出优异的合金成分均匀性。此外,在异质界面处可以看到镓和铟的突然跃迁。这些显著的性质赋予了非凡的光学性能。尽管在径向方向观察到合金成分波动,但在光学泵浦下,核壳纳米柱中实现了激光发射。这些结果表明基于 InGaAs 的核壳异质结构在硅上直接集成的高效光电器件和高速异质结晶体管方面具有潜力。

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