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外延核壳和核-多壳层纳米线异质结构

Epitaxial core-shell and core-multishell nanowire heterostructures.

作者信息

Lauhon Lincoln J, Gudiksen Mark S, Wang Deli, Lieber Charles M

机构信息

Department of Chemistry and Chemical Biology, Harvard University, Cambridge, Massachusetts 02138, USA.

出版信息

Nature. 2002 Nov 7;420(6911):57-61. doi: 10.1038/nature01141.

Abstract

Semiconductor heterostructures with modulated composition and/or doping enable passivation of interfaces and the generation of devices with diverse functions. In this regard, the control of interfaces in nanoscale building blocks with high surface area will be increasingly important in the assembly of electronic and photonic devices. Core-shell heterostructures formed by the growth of crystalline overlayers on nanocrystals offer enhanced emission efficiency, important for various applications. Axial heterostructures have also been formed by a one-dimensional modulation of nanowire composition and doping. However, modulation of the radial composition and doping in nanowire structures has received much less attention than planar and nanocrystal systems. Here we synthesize silicon and germanium core-shell and multishell nanowire heterostructures using a chemical vapour deposition method applicable to a variety of nanoscale materials. Our investigations of the growth of boron-doped silicon shells on intrinsic silicon and silicon-silicon oxide core-shell nanowires indicate that homoepitaxy can be achieved at relatively low temperatures on clean silicon. We also demonstrate the possibility of heteroepitaxial growth of crystalline germanium-silicon and silicon-germanium core-shell structures, in which band-offsets drive hole injection into either germanium core or shell regions. Our synthesis of core-multishell structures, including a high-performance coaxially gated field-effect transistor, indicates the general potential of radial heterostructure growth for the development of nanowire-based devices.

摘要

具有调制组成和/或掺杂的半导体异质结构能够实现界面钝化,并生成具有多种功能的器件。在这方面,在具有高表面积的纳米级构建块中控制界面,对于电子和光子器件的组装将变得越来越重要。通过在纳米晶体上生长晶体覆盖层形成的核壳异质结构具有更高的发射效率,这对于各种应用都很重要。轴向异质结构也通过纳米线组成和掺杂的一维调制而形成。然而,纳米线结构中径向组成和掺杂的调制比平面和纳米晶体系统受到的关注要少得多。在这里,我们使用适用于多种纳米级材料的化学气相沉积方法,合成了硅和锗的核壳及多壳纳米线异质结构。我们对本征硅和硅-氧化硅核壳纳米线上硼掺杂硅壳生长的研究表明,在清洁的硅上,在相对较低的温度下可以实现同质外延生长。我们还证明了晶体锗-硅和硅-锗核壳结构异质外延生长的可能性,其中能带偏移驱动空穴注入到锗核或壳区域。我们对包括高性能同轴栅场效应晶体管在内的核-多壳结构的合成,表明了径向异质结构生长对于基于纳米线的器件开发的普遍潜力。

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