Furlan Andrej, Lu Jun, Hultman Lars, Jansson Ulf, Magnuson Martin
Thin Film Physics Division, Department of Physics, IFM, Linköping University, SE-58183 Linköping, Sweden.
J Phys Condens Matter. 2014 Oct 15;26(41):415501. doi: 10.1088/0953-8984/26/41/415501. Epub 2014 Sep 19.
The crystal structure and chemical bonding of magnetron-sputtering deposited nickel carbide Ni₁-xCx (0.05 ⩽ x⩽0.62) thin films have been investigated by high-resolution x-ray diffraction, transmission electron microscopy, x-ray photoelectron spectroscopy, Raman spectroscopy, and soft x-ray absorption spectroscopy. By using x-ray as well as electron diffraction, we found carbon-containing hcp-Ni (hcp-NiCy phase), instead of the expected rhombohedral-Ni₃C. At low carbon content (4.9 at%), the thin film consists of hcp-NiCy nanocrystallites mixed with a smaller amount of fcc-NiCx. The average grain size is about 10-20 nm. With the increase of carbon content to 16.3 at%, the film contains single-phase hcp-NiCy nanocrystallites with expanded lattice parameters. With a further increase of carbon content to 38 at%, and 62 at%, the films transform to x-ray amorphous materials with hcp-NiCy and fcc-NiCx nanodomain structures in an amorphous carbon-rich matrix. Raman spectra of carbon indicate dominant sp(2) hybridization, consistent with photoelectron spectra that show a decreasing amount of C-Ni phase with increasing carbon content. The Ni 3d-C 2p hybridization in the hexagonal structure gives rise to the salient double-peak structure in Ni 2p soft x-ray absorption spectra at 16.3 at% that changes with carbon content. We also show that the resistivity is not only governed by the amount of carbon, but increases by more than a factor of two when the samples transform from crystalline to amorphous.
通过高分辨率X射线衍射、透射电子显微镜、X射线光电子能谱、拉曼光谱和软X射线吸收光谱,研究了磁控溅射沉积的碳化镍Ni₁-xCx(0.05⩽x⩽0.62)薄膜的晶体结构和化学键合。通过使用X射线以及电子衍射,我们发现了含碳的hcp-Ni(hcp-NiCy相),而不是预期的菱面体Ni₃C。在低碳含量(4.9 at%)时,薄膜由hcp-NiCy纳米微晶与少量fcc-NiCx混合组成。平均晶粒尺寸约为10-20nm。随着碳含量增加到16.3 at%,薄膜包含具有扩大晶格参数的单相hcp-NiCy纳米微晶。当碳含量进一步增加到38 at%和62 at%时,薄膜转变为X射线非晶材料,在富含非晶碳的基体中具有hcp-NiCy和fcc-NiCx纳米域结构。碳的拉曼光谱表明主要是sp(2)杂化,这与光电子能谱一致,光电子能谱显示随着碳含量增加C-Ni相的量减少。六边形结构中的Ni 3d-C 2p杂化在16.3 at%的Ni 2p软X射线吸收光谱中产生显著的双峰结构,该结构随碳含量变化。我们还表明,电阻率不仅受碳含量的控制,而且当样品从晶体转变为非晶体时,电阻率增加超过两倍。