Eifert Alexander, Mizaikoff Boris, Kranz Christine
Institute of Analytical and Bioanalytical Chemistry, University of Ulm, Ulm, Germany.
Institute of Analytical and Bioanalytical Chemistry, University of Ulm, Ulm, Germany.
Micron. 2015 Jan;68:27-35. doi: 10.1016/j.micron.2014.08.008. Epub 2014 Sep 16.
An advanced software-controlled focused ion beam (FIB) patterning process for the fabrication of combined atomic force-scanning electrochemical microscopy (AFM-SECM) probes is reported. FIB milling is a standard process in scanning probe microscopy (SPM) for specialized SPM probe fabrication. For AFM-SECM, milling of bifunctional probes usually requires several milling steps. Milling such complex multi-layer/multi-material structures using a single milling routine leads to significantly reduced fabrication times and costs. Based on an advanced patterning routine, a semi-automated FIB milling routine for fabricating combined AFM-SECM probes with high reproducibility is presented with future potential for processing at a wafer level. The fabricated bifunctional probes were electrochemically characterized using cyclic voltammetry, and their performance for AFM-SECM imaging experiments was tested. Different insulation materials (Parylene-C and SixNy) have been evaluated with respect to facilitating the overall milling process, the influence on the electrochemical behavior and the long-term stability of the obtained probes. Furthermore, the influence of material composition and layer sequence to the overall shape and properties of the combined probes were evaluated.
报道了一种用于制造组合式原子力-扫描电化学显微镜（AFM-SECM）探针的先进软件控制聚焦离子束（FIB）图案化工艺。FIB铣削是扫描探针显微镜（SPM）中用于制造专用SPM探针的标准工艺。对于AFM-SECM，双功能探针的铣削通常需要多个铣削步骤。使用单一铣削程序铣削这种复杂的多层/多材料结构可显著减少制造时间和成本。基于先进的图案化程序，提出了一种用于制造具有高再现性的组合式AFM-SECM探针的半自动FIB铣削程序，未来具有在晶圆级进行加工的潜力。使用循环伏安法对制造的双功能探针进行电化学表征，并测试其在AFM-SECM成像实验中的性能。针对促进整体铣削过程、对电化学行为的影响以及所得探针的长期稳定性，对不同的绝缘材料（聚对二甲苯-C和SixNy）进行了评估。此外，还评估了材料组成和层序列对组合式探针整体形状和性能的影响。
