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纳米结构金涂层的复制提取方法以及结合扫描电子显微镜和透射电子显微镜技术的取向测定

Replica extraction method on nanostructured gold coatings and orientation determination combining SEM and TEM techniques.

作者信息

Bocker Christian, Kracker Michael, Rüssel Christian

机构信息

Otto-Schott-Institut,University Jena,Fraunhoferstr 6,07743 Jena,Germany.

出版信息

Microsc Microanal. 2014 Dec;20(6):1654-61. doi: 10.1017/S1431927614013336. Epub 2014 Oct 14.

Abstract

In the field of electron microscopy the replica technique is known as an indirect method and also as an extraction method that is usually applied on metallurgical samples. This contribution describes a fast and simple transmission electron microscopic (TEM) sample preparation by complete removal of nanoparticles from a substrate surface that allows the study of growth mechanisms of nanostructured coatings. The comparison and combination of advanced diffraction techniques in the TEM and scanning electron microscopy (SEM) provide possibilities for operators with access to both facilities. The analysis of TEM-derived diffraction patterns (convergent beam electron diffraction) in the SEM/electron backscatter diffraction software simplifies the application, especially when the patterns are not aligned along a distinct zone axis. The study of the TEM sample directly by SEM and transmission Kikuchi diffraction allows cross-correlation with the TEM results.

摘要

在电子显微镜领域,复型技术是一种间接方法,也被称为萃取方法,通常应用于冶金样品。本文介绍了一种快速简便的透射电子显微镜(TEM)样品制备方法,通过从基底表面完全去除纳米颗粒,从而能够研究纳米结构涂层的生长机制。在配备了TEM和扫描电子显微镜(SEM)两种设备的情况下,将TEM中先进的衍射技术与SEM进行比较和结合,为操作人员提供了更多可能。利用SEM/电子背散射衍射软件对TEM衍生的衍射图案(会聚束电子衍射)进行分析,简化了应用过程,尤其是当图案未沿特定晶带轴排列时。通过SEM直接研究TEM样品以及进行透射菊池衍射,能够实现与TEM结果的相互关联。

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