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用于SOI芯片上集成光学应用的亚波长光栅组件。

Sub-wavelength grating components for integrated optics applications on SOI chips.

作者信息

Donzella Valentina, Sherwali Ahmed, Flueckiger Jonas, Talebi Fard Sahba, Grist Samantha M, Chrostowski Lukas

出版信息

Opt Express. 2014 Aug 25;22(17):21037-50. doi: 10.1364/OE.22.021037.

Abstract

In this paper we demonstrate silicon on insulator (SOI) sub-wavelength grating (SWG) optical components for integrated optics and sensing. Light propagation in SWG devices is studied and realized with no cladding on top of the waveguide. In particular, we focused on SWG bends, tapers and directional couplers, all realized with compatible geometries in order to be used as building blocks for more complex integrated optics devices (interferometers, switches, resonators, etc.). Fabricated SWG tapers for TE and TM polarizations are described; they allow for connecting SWG devices to regular strip waveguides with loss lower than 1 dB per taper. Our SWG directional coupler presents a very compact design and a negligible wavelength dependence of its crossover length (and as a consequence of its coupling coefficient, κ), over a 40 nm bandwidth. This wavelength flatten response represents a bandwidth enhancement with respect to standard directional couplers (made using strip or rib waveguides), in particular for the TE mode. SWG bends are demonstrated, their loss dependence on radius is analyzed, and fabricated bends have a loss in the range 0.8-1.6 dB per 90 degrees bend. Simulated and measured results show promise for large-scale fabrication of complex optical devices and high sensitivity sensors based on SWG waveguides with engineered optical properties, tailored to specific applications.

摘要

在本文中,我们展示了用于集成光学和传感的绝缘体上硅(SOI)亚波长光栅(SWG)光学组件。研究并实现了SWG器件中的光传播,其波导顶部没有包层。特别地,我们专注于SWG弯曲、渐变和定向耦合器,所有这些都通过兼容的几何结构实现,以便用作更复杂的集成光学器件(干涉仪、开关、谐振器等)的构建模块。描述了用于TE和TM偏振的制造的SWG渐变;它们允许将SWG器件连接到常规条形波导,每个渐变的损耗低于1 dB。我们的SWG定向耦合器呈现出非常紧凑的设计,并且在40 nm带宽内其交叉长度(以及其耦合系数κ)的波长依赖性可忽略不计。这种波长平坦响应相对于标准定向耦合器(使用条形或肋形波导制成)代表了带宽增强,特别是对于TE模式。展示了SWG弯曲,分析了其损耗对半径的依赖性,并且制造的弯曲每90度弯曲的损耗在0.8 - 1.6 dB范围内。模拟和测量结果表明,基于具有工程光学特性、针对特定应用定制的SWG波导,有望大规模制造复杂光学器件和高灵敏度传感器。

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