用于波长为4.5纳米的大数值孔径物镜的多层镀膜掠入射聚光镜。

Multilayer coated grazing incidence condenser for large numerical aperture objective at wavelength of 4.5 nm.

作者信息

Ejima T, Hatano T, Ohno K, Fukayama T, Aihara S, Yanagihara M, Tsuru T

出版信息

Appl Opt. 2014 Oct 10;53(29):6846-52. doi: 10.1364/AO.53.006846.

DOI:10.1364/AO.53.006846

Abstract

A grazing incidence condenser is developed for objectives with large numerical aperture working in Carbon-window wavelength region (λ=4.4-5.0 nm) with the use of a point light source. The condenser is composed of four pieces of toroidal mirrors and a piece of the mirror was fabricated to evaluate the performance of the mirror. The radii of the toroidal mirror are determined by ray-trace calculation, and each radius of the mirror substrate and the roughness of the polished surface were evaluated to satisfy the designed parameter. A Co/C reflection multilayer is also designed to reflect soft x-ray light at 4.5 nm wavelength, and the reflection multilayer was deposited on the mirror surface. Measured reflectance of the toroidal mirror with the reflection multilayer is higher than 0.32 at 4.5 nm wavelength.

摘要

开发了一种掠入射聚光镜，用于在碳窗波长区域（λ = 4.4 - 5.0 nm）使用点光源工作的大数值孔径物镜。该聚光镜由四块环形镜组成，制作了一块镜来评估镜子的性能。环形镜的半径通过光线追迹计算确定，对镜基板的每个半径和抛光表面的粗糙度进行了评估，以满足设计参数。还设计了一种Co/C反射多层膜，用于反射4.5 nm波长的软X射线光，并将反射多层膜沉积在镜表面。带有反射多层膜的环形镜在4.5 nm波长处的测量反射率高于0.32。