Pelin Ayerden N, Aygun Ugur, Holmstrom Sven T S, Olcer Selim, Can Basarbatu, Stehle Jean-Louis, Urey Hakan
Appl Opt. 2014 Nov 1;53(31):7267-72. doi: 10.1364/AO.53.007267.
Current Fourier transform infrared spectroscopy (FTIR) systems have very good spectral resolution, but are bulky, sensitive to vibrations, and slow. We developed a new FTIR system using a microelectromechanical system (MEMS)-based lamellar grating interferometer that is fast, compact, and achromatic (i.e., does not require a beam splitter). The MEMS device has >10 mm active surface area, up to ±325 μm mechanical displacement, and a 343 Hz resonant operation frequency. The system uses a 5 MHz bandwidth custom infrared (IR) detector and a small emission area custom blackbody source to achieve fast interferogram acquisition and compact form factor. Effects of lamellar grating period, detector size, laser reference, apodization, and averaging of data on the spectral resolution are discussed. The measurement time ranges from 1.5 to 100 ms depending on the averaging time. In the target range of 2.5-16 μm (625-4000 cm) a spectral resolution of 15-20 cm is demonstrated. The measurements are shown to be stable over a long time.
当前的傅里叶变换红外光谱（FTIR）系统具有非常好的光谱分辨率，但体积庞大、对振动敏感且速度较慢。我们开发了一种新的FTIR系统，该系统使用基于微机电系统（MEMS）的层状光栅干涉仪，具有快速、紧凑且消色差的特点（即不需要分束器）。该MEMS器件的有效表面积大于10 mm²，机械位移可达±325 µm，谐振工作频率为343 Hz。该系统使用带宽为5 MHz的定制红外（IR）探测器和小发射面积的定制黑体源，以实现快速干涉图采集和紧凑的外形尺寸。讨论了层状光栅周期、探测器尺寸、激光参考、变迹以及数据平均对光谱分辨率的影响。测量时间根据平均时间在1.5至100 ms范围内变化。在2.5 - 16 µm（625 - 4000 cm⁻¹）的目标范围内，展示了15 - 20 cm⁻¹的光谱分辨率。测量结果表明在长时间内是稳定的。
