基于 ZnO/SiO2 复合薄膜的表面声波氨传感器。
Surface acoustic wave ammonia sensor based on ZnO/SiO2 composite film.
机构信息
Institute of Fundamental and Frontier Sciences and School of Physical Electronics, University of Electronic Science and Technology of China, Chengdu 610054, PR China.
Sichuan Institute of Piezoelectric and Acousto-Optic Technology, Chongqing 400060, PR China.
出版信息
J Hazard Mater. 2015 Mar 21;285:368-74. doi: 10.1016/j.jhazmat.2014.12.014. Epub 2014 Dec 10.
A surface acoustic wave (SAW) resonator with ZnO/SiO2 (ZS) composite film was used as an ammonia sensor in this study. ZS composite films were deposited on the surface of SAW devices using the sol-gel method, and were characterized using SEM, AFM, and XRD. The performance of the sensors under ammonia gas was optimized by adjusting the molar ratio of ZnO:SiO2 to 1:1, 1:2 and 1:3, and the sensor with the ratio of ZnO to SiO2 equaling to 1:2 was found to have the best performance. The response of sensor was 1.132 kHz under 10 ppm NH3, which was much higher than that of the sensor based on a pristine ZnO film. Moreover, the sensor has good selectivity, reversibility and stability at room temperature. These can be attributed to the enhanced absorption of ammonia and unique surface reaction on composite films due to the existence of silica.
本研究采用 ZnO/SiO2（ZS）复合薄膜的声表面波（SAW）谐振器作为氨气传感器。采用溶胶-凝胶法在 SAW 器件表面沉积 ZS 复合薄膜，并采用 SEM、AFM 和 XRD 进行了表征。通过调整 ZnO:SiO2 的摩尔比为 1:1、1:2 和 1:3，优化了传感器在氨气下的性能，发现 ZnO 与 SiO2 的比例为 1:2 的传感器具有最佳性能。在 10 ppm NH3 下，传感器的响应为 1.132 kHz，明显高于基于原始 ZnO 薄膜的传感器。此外，该传感器在室温下具有良好的选择性、可逆性和稳定性。这可以归因于由于二氧化硅的存在，增强了对氨的吸收和复合薄膜上独特的表面反应。
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