Wu Yingjun, Lei Ming, Xia Xiaohong
Ministry-of-Education Key Laboratory for the Green Preparation and Application of Functional Materials, School of Materials Science & Engineering, Hubei University, Wuhan 430062, China.
Wuhan Micro & Nano Sensor Technology Co., Ltd., Xingye Building, Wuda Science and Technology Park, Donghu New Technology Development Zone, Wuhan 430223, China.
Sensors (Basel). 2024 Dec 19;24(24):8125. doi: 10.3390/s24248125.
The MEMS gas sensor is one of the most promising gas sensors nowadays due to its advantage of small size, low power consumption, and easy integration. It has been widely applied in energy components, portable devices, smart living, etc. The performance of the gas sensor is largely determined by the sensing materials, as well as the fabrication methods. In this review, recent research progress on H, CO, NO, HS, and NH MEMS sensors is surveyed, and sensing materials such as metal oxide semiconductors, organic materials, and carbon materials, modification methods like construction of heterostructures, doping, and surface modification of noble metals, and fabrication methods including chemical vapor deposition (CVD), sputtering deposition (SD), etc., are summarized. The effect of materials and technology on the performance of the MEMS gas sensors are compared.
微机电系统（MEMS）气体传感器因其尺寸小、功耗低、易于集成等优点，是当今最具前景的气体传感器之一。它已广泛应用于能源部件、便携式设备、智能家居等领域。气体传感器的性能在很大程度上取决于传感材料以及制造方法。在这篇综述中，调研了氢、一氧化碳、一氧化氮、硫化氢和氨气MEMS传感器的最新研究进展，总结了诸如金属氧化物半导体、有机材料和碳材料等传感材料，异质结构构建、掺杂以及贵金属表面改性等改性方法，以及包括化学气相沉积（CVD）、溅射沉积（SD）等在内的制造方法。比较了材料和技术对MEMS气体传感器性能的影响。
