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扫描电子显微镜中用于图像质量评估的对比度噪声比。

The contrast-to-noise ratio for image quality evaluation in scanning electron microscopy.

作者信息

Timischl F

机构信息

JEOL Technics Ltd., 2-6-38 Musashino, Akishima-shi, Tokyo, Japan.

出版信息

Scanning. 2015 Jan-Feb;37(1):54-62. doi: 10.1002/sca.21179. Epub 2014 Dec 22.

DOI:10.1002/sca.21179
PMID:25533747
Abstract

The contrast-to-noise ratio (CNR) is presented and characterized as a tool for quantitative noise measurement of scanning electron microscope (SEM) images. Analogies as well as differences between the CNR and the widely used signal-to-noise ratio (SNR) are analytically and experimentally investigated. With respect to practical SEM image evaluation using the contrast-to-noise ratio, a standard specimen and an evaluation program are presented.

摘要

对比度噪声比（CNR）作为一种用于扫描电子显微镜（SEM）图像定量噪声测量的工具被提出并进行了表征。对CNR与广泛使用的信噪比（SNR）之间的异同进行了分析和实验研究。关于使用对比度噪声比进行实际的SEM图像评估，给出了一个标准样品和一个评估程序。

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