Ahn Jae-Hyuk, Yun Jeonghoon, Moon Dong-Il, Choi Yang-Kyu, Park Inkyu
Department of Mechanical Engineering, KAIST, Daejeon 305-701, Korea. KI for the NanoCentury, KAIST, Daejeon 305-701, Korea. Mobile Sensor and IT Convergence (MOSAIC) Center, KAIST, Daejeon 305-701, Korea.
Nanotechnology. 2015 Mar 6;26(9):095501. doi: 10.1088/0957-4484/26/9/095501. Epub 2015 Feb 11.
Self-heated silicon nanowire sensors for high-performance, ultralow-power hydrogen detection have been developed. A top-down nanofabrication method based on well-established semiconductor manufacturing technology was utilized to fabricate silicon nanowires in wafer scale with high reproducibility and excellent compatibility with electronic readout circuits. Decoration of palladium nanoparticles onto the silicon nanowires enables sensitive and selective detection of hydrogen gas at room temperature. Self-heating of silicon nanowire sensors allows us to enhance response and recovery performances to hydrogen gas, and to reduce the influence of interfering gases such as water vapor and carbon monoxide. A short-pulsed heating during recovery was found to be effective for additional reduction of operation power as well as recovery characteristics. This self-heated silicon nanowire gas sensor will be suitable for ultralow-power applications such as mobile telecommunication devices and wireless sensing nodes.
已开发出用于高性能、超低功耗氢气检测的自热式硅纳米线传感器。采用基于成熟半导体制造技术的自上而下的纳米制造方法，以晶圆规模制造具有高重现性且与电子读出电路兼容性极佳的硅纳米线。在硅纳米线上装饰钯纳米颗粒能够在室温下灵敏且选择性地检测氢气。硅纳米线传感器的自热特性使我们能够提高对氢气的响应和恢复性能，并减少水蒸气和一氧化碳等干扰气体的影响。发现在恢复过程中进行短脉冲加热对于进一步降低运行功耗以及改善恢复特性有效。这种自热式硅纳米线气体传感器将适用于诸如移动电信设备和无线传感节点等超低功耗应用。
