Premper J, Sander D, Kirschner J
Max-Planck-Institut für Mikrostrukturphysik, Weinberg 2, D-06120 Halle/Saale, Germany.
Rev Sci Instrum. 2015 Mar;86(3):033902. doi: 10.1063/1.4913946.
An in situ stress measurement setup using an optical 2-beam curvature technique is described which is compatible with the stringent growth conditions of pulsed laser deposition (PLD) of perovskite oxides, which involves high substrate temperatures of 1000 K and oxygen partial pressures of up to 1 × 10(-4) millibars. The stress measurements are complemented by medium energy electron diffraction (MEED), Auger electron spectroscopy, and additional growth rate monitoring by a quartz microbalance. A shielded filament is used to allow for simultaneous stress and MEED measurements at high substrate temperatures. A computer-controlled mirror scans an excimer laser beam over a stationary PLD target. This avoids mechanical noise originating from rotating PLD targets, and the setup does not suffer from limited lifetime issues of ultra high vacuum (UHV) rotary feedthroughs.
描述了一种使用光学双光束曲率技术的原位应力测量装置，该装置与钙钛矿氧化物脉冲激光沉积（PLD）的严格生长条件兼容，PLD涉及高达1000 K的高衬底温度和高达1×10（-4）毫巴的氧分压。应力测量由中能电子衍射（MEED）、俄歇电子能谱以及石英微天平进行的额外生长速率监测补充。使用屏蔽灯丝以允许在高衬底温度下同时进行应力和MEED测量。计算机控制的镜子在固定的PLD靶材上扫描准分子激光束。这避免了源自旋转PLD靶材的机械噪声，并且该装置不存在超高真空（UHV）旋转馈通的有限寿命问题。
