Suram Santosh K, Zhou Lan, Becerra-Stasiewicz Natalie, Kan Kevin, Jones Ryan J R, Kendrick Brian M, Gregoire John M
Joint Center for Artificial Photosynthesis, California Institute of Technology, Pasadena, California 91125, USA.
Process Equipment Division, Kurt J Lesker Company, Clairton, Pennsylvania 15025, USA.
Rev Sci Instrum. 2015 Mar;86(3):033904. doi: 10.1063/1.4914466.
Many next-generation technologies are limited by material performance, leading to increased interest in the discovery of advanced materials using combinatorial synthesis, characterization, and screening. Several combinatorial synthesis techniques, such as solution based methods, advanced manufacturing, and physical vapor deposition, are currently being employed for various applications. In particular, combinatorial magnetron sputtering is a versatile technique that provides synthesis of high-quality thin film composition libraries. Spatially addressing the composition of these thin films generally requires elemental quantification measurements using techniques such as energy-dispersive X-ray spectroscopy or X-ray fluorescence spectroscopy. Since these measurements are performed ex-situ and post-deposition, they are unable to provide real-time design of experiments, a capability that is required for rapid synthesis of a specific composition library. By using three quartz crystal monitors attached to a stage with translational and rotational degrees of freedom, we measure three-dimensional deposition profiles of deposition sources whose tilt with respect to the substrate is robotically controlled. We exhibit the utility of deposition profiles and tilt control to optimize the deposition geometry for specific combinatorial synthesis experiments.
许多下一代技术受到材料性能的限制，这使得人们对使用组合合成、表征和筛选来发现先进材料的兴趣日益增加。目前，几种组合合成技术，如基于溶液的方法、先进制造和物理气相沉积，正被用于各种应用。特别是，组合磁控溅射是一种通用技术，可用于合成高质量的薄膜成分库。对这些薄膜的成分进行空间寻址通常需要使用能量色散X射线光谱或X射线荧光光谱等技术进行元素定量测量。由于这些测量是在沉积后进行的非原位测量，因此无法提供实验的实时设计，而这是快速合成特定成分库所必需的能力。通过使用三个附着在具有平移和旋转自由度的平台上的石英晶体监测器，我们测量了相对于基板倾斜度由机器人控制的沉积源的三维沉积轮廓。我们展示了沉积轮廓和倾斜控制在优化特定组合合成实验的沉积几何形状方面的效用。
