Department of Chemical and Biomolecular Engineering University of Notre Dame , Notre Dame , Indiana 46556 , United States.
ACS Comb Sci. 2019 Jul 8;21(7):501-515. doi: 10.1021/acscombsci.9b00032. Epub 2019 Jun 19.
High-throughput combinatorial investigations are transforming materials discovery, phase diagram development, and processing optimization. Thin-film deposition techniques are frequently used to fabricate sample libraries employed in these studies. Various adaptations of well-known thin-film chemical vapor deposition (CVD) and physical vapor deposition (PVD) techniques utilized for the synthesis of inorganic combinatorial thin-film materials libraries are reviewed, with novel processing approaches being highlighted. Methods for developing gradients in composition of other film properties are described. Issues and considerations specific to thin-film processing of combinatorial materials libraries are discussed, with some emphasis on catalytic applications.
高通量组合研究正在改变材料发现、相图开发和工艺优化。薄膜沉积技术常用于制备这些研究中使用的样品库。本文综述了用于合成无机组合薄膜材料库的各种知名薄膜化学气相沉积（CVD）和物理气相沉积（PVD）技术的改进，重点介绍了新颖的处理方法。还介绍了开发其他薄膜性能组成梯度的方法。讨论了组合材料库薄膜处理的具体问题和考虑因素，重点介绍了催化应用。
