Goray Leonid, Lubov Maxim
Opt Express. 2015 Apr 20;23(8):10703-13. doi: 10.1364/OE.23.010703.
Combined computer simulations of the growth of multilayer mirrors and their exact differential reflection coefficients in the soft-x-ray-EUV range have been conducted. The proposed model describes the variation of the surface roughness of the multilayer Al/Zr mirror boundary profiles taking into account a random noise source. Theoretically calculated Al/Zr boundary profiles allow one to know real rough boundary statistics including rms roughnesses and correlation lengths and, to obtain rigorously EUV specular and diffuse reflection coefficients. The proposed integrated approach opens up a way to performing exact theoretical studies similar in accuracy to results obtained by quantitative microscopy investigations of nanoreliefs and synchrotron radiation measurements.
已经对多层镜在软X射线-极紫外波段的生长及其精确的微分反射系数进行了联合计算机模拟。所提出的模型考虑了随机噪声源，描述了多层Al/Zr镜边界轮廓表面粗糙度的变化。理论计算的Al/Zr边界轮廓能够让人了解包括均方根粗糙度和相关长度在内的实际粗糙边界统计数据，并严格获得极紫外镜面反射和漫反射系数。所提出的综合方法为进行精确的理论研究开辟了一条途径，其精度与通过纳米浮雕的定量显微镜研究和同步辐射测量获得的结果相似。
