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用于具有优化对比度的不同光子结构纳米图案化的柔性干涉光刻中的偏振控制。

Polarization control in flexible interference lithography for nano-patterning of different photonic structures with optimized contrast.

作者信息

He Jianfang, Fang Xiaohui, Lin Yuanhai, Zhang Xinping

出版信息

Opt Express. 2015 May 4;23(9):11518-25. doi: 10.1364/OE.23.011518.

Abstract

Half-wave plates were introduced into an interference-lithography scheme consisting of three fibers that were arranged into a rectangular triangle. Such a flexible and compact geometry allows convenient tuning of the polarizations of both the UV laser source and each branch arm. This not only enables optimization of the contrast of the produced photonic structures with expected square lattices, but also multiplies the nano-patterning functions of a fixed design of fiber-based interference lithography. The patterns of the photonic structures can be thus tuned simply by rotating a half-wave plate.

摘要

半波片被引入到一种干涉光刻方案中,该方案由三根排列成直角三角形的光纤组成。这种灵活且紧凑的结构允许方便地调节紫外激光源和每个分支臂的偏振态。这不仅能够优化所产生的具有预期方形晶格的光子结构的对比度,还能成倍增加基于光纤的干涉光刻固定设计的纳米图案化功能。因此,只需旋转半波片就能调整光子结构的图案。

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