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综述：用于衍射光栅的激光干涉光刻技术及其在编码器和光谱仪中的应用

A Review: Laser Interference Lithography for Diffraction Gratings and Their Applications in Encoders and Spectrometers.

作者信息

Luo Linbin, Shan Shuonan, Li Xinghui

机构信息

Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China.

Tsinghua-Berkeley Shenzhen Institute, Tsinghua University, Shenzhen 518055, China.

出版信息

Sensors (Basel). 2024 Oct 14;24(20):6617. doi: 10.3390/s24206617.

DOI:10.3390/s24206617
PMID:39460098
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11510832/
Abstract

The unique diffractive properties of gratings have made them essential in a wide range of applications, including spectral analysis, precision measurement, optical data storage, laser technology, and biomedical imaging. With advancements in micro- and nanotechnologies, the demand for more precise and efficient grating fabrication has increased. This review discusses the latest advancements in grating manufacturing techniques, particularly highlighting laser interference lithography, which excels in sub-beam generation through wavefront and amplitude division. Techniques such as Lloyd's mirror configurations produce stable interference fringe fields for grating patterning in a single exposure. Orthogonal and non-orthogonal, two-axis Lloyd's mirror interferometers have advanced the fabrication of two-dimensional gratings and large-area gratings, respectively, while laser interference combined with concave lenses enables the creation of concave gratings. Grating interferometry, utilizing optical interference principles, allows for highly precise measurements of minute displacements at the nanometer to sub-nanometer scale. This review also examines the application of grating interferometry in high-precision, absolute, and multi-degree-of-freedom measurement systems. Progress in grating fabrication has significantly advanced spectrometer technology, with integrated structures such as concave gratings, Fresnel gratings, and grating-microlens arrays driving the miniaturization of spectrometers and expanding their use in compact analytical instruments.

摘要

光栅独特的衍射特性使其在广泛的应用中不可或缺，包括光谱分析、精密测量、光学数据存储、激光技术和生物医学成像。随着微纳技术的进步，对更精确、高效的光栅制造的需求不断增加。本文综述了光栅制造技术的最新进展，特别强调了激光干涉光刻技术，该技术通过波前和振幅分割在子光束生成方面表现出色。诸如劳埃德镜配置等技术可在单次曝光中产生用于光栅图案化的稳定干涉条纹场。正交和非正交的双轴劳埃德镜干涉仪分别推动了二维光栅和大面积光栅的制造，而激光干涉与凹透镜相结合则能够制造凹面光栅。利用光学干涉原理的光栅干涉测量法能够在纳米至亚纳米尺度上对微小位移进行高精度测量。本文还探讨了光栅干涉测量法在高精度、绝对和多自由度测量系统中的应用。光栅制造方面的进展显著推动了光谱仪技术的发展，诸如凹面光栅、菲涅耳光栅和光栅 - 微透镜阵列等集成结构推动了光谱仪的小型化，并扩大了其在紧凑型分析仪器中的应用。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c4ca/11510832/27901a144b12/sensors-24-06617-g011.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c4ca/11510832/27901a144b12/sensors-24-06617-g011.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c4ca/11510832/3b7dbf7c96de/sensors-24-06617-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c4ca/11510832/fba5c812a0f6/sensors-24-06617-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c4ca/11510832/b5e2b5b0b65f/sensors-24-06617-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c4ca/11510832/18869295bb2e/sensors-24-06617-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c4ca/11510832/f11585af9860/sensors-24-06617-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c4ca/11510832/0131df7ab327/sensors-24-06617-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c4ca/11510832/6aad6f86d272/sensors-24-06617-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c4ca/11510832/27901a144b12/sensors-24-06617-g011.jpg

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