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激光干涉光刻——一种制备可控周期结构的方法

Laser Interference Lithography-A Method for the Fabrication of Controlled Periodic Structures.

作者信息

Liu Ri, Cao Liang, Liu Dongdong, Wang Lu, Saeed Sadaf, Wang Zuobin

机构信息

International Research Centre for Nano Handling and Manufacturing of China, Changchun University of Science and Technology, Changchun 130022, China.

Centre for Opto/Bio-Nano Measurement and Manufacturing, Zhongshan Institute, Changchun University of Science and Technology, Zhongshan 528437, China.

出版信息

Nanomaterials (Basel). 2023 Jun 7;13(12):1818. doi: 10.3390/nano13121818.

DOI:10.3390/nano13121818
PMID:37368248
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10301502/
Abstract

A microstructure determines macro functionality. A controlled periodic structure gives the surface specific functions such as controlled structural color, wettability, anti-icing/frosting, friction reduction, and hardness enhancement. Currently, there are a variety of controllable periodic structures that can be produced. Laser interference lithography (LIL) is a technique that allows for the simple, flexible, and rapid fabrication of high-resolution periodic structures over large areas without the use of masks. Different interference conditions can produce a wide range of light fields. When an LIL system is used to expose the substrate, a variety of periodic textured structures, such as periodic nanoparticles, dot arrays, hole arrays, and stripes, can be produced. The LIL technique can be used not only on flat substrates, but also on curved or partially curved substrates, taking advantage of the large depth of focus. This paper reviews the principles of LIL and discusses how the parameters, such as spatial angle, angle of incidence, wavelength, and polarization state, affect the interference light field. Applications of LIL for functional surface fabrication, such as anti-reflection, controlled structural color, surface-enhanced Raman scattering (SERS), friction reduction, superhydrophobicity, and biocellular modulation, are also presented. Finally, we present some of the challenges and problems in LIL and its applications.

摘要

微观结构决定宏观功能。可控的周期性结构赋予表面特定功能，如可控结构色、润湿性、防结冰/结霜、减摩和硬度增强。目前，可以制造出多种可控的周期性结构。激光干涉光刻（LIL）是一种无需使用掩模就能在大面积上简单、灵活且快速制造高分辨率周期性结构的技术。不同的干涉条件可以产生广泛的光场。当使用LIL系统对衬底进行曝光时，可以产生各种周期性纹理结构，如周期性纳米颗粒、点阵列、孔阵列和条纹。利用LIL技术大景深的优势，它不仅可以用于平面衬底，还可以用于曲面或部分曲面衬底。本文回顾了LIL的原理，并讨论了空间角度、入射角、波长和偏振态等参数如何影响干涉光场。还介绍了LIL在功能表面制造中的应用，如抗反射、可控结构色、表面增强拉曼散射（SERS）、减摩、超疏水性和生物细胞调制。最后，我们提出了LIL及其应用中的一些挑战和问题。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/721ac7102308/nanomaterials-13-01818-g015.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/a49e50746293/nanomaterials-13-01818-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/0e46aea5fcf4/nanomaterials-13-01818-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/05cfb8d74900/nanomaterials-13-01818-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/224477cb89ad/nanomaterials-13-01818-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/7b01bd2e24bf/nanomaterials-13-01818-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/27c8490774cd/nanomaterials-13-01818-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/629e1c82691a/nanomaterials-13-01818-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/dc7ed034e599/nanomaterials-13-01818-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/484fccf10d75/nanomaterials-13-01818-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/58c57108109c/nanomaterials-13-01818-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/9308e17152fb/nanomaterials-13-01818-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/f8f33ac7c466/nanomaterials-13-01818-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/95bcf670b943/nanomaterials-13-01818-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/a2365ac5abb0/nanomaterials-13-01818-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/721ac7102308/nanomaterials-13-01818-g015.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/a49e50746293/nanomaterials-13-01818-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/0e46aea5fcf4/nanomaterials-13-01818-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/05cfb8d74900/nanomaterials-13-01818-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/224477cb89ad/nanomaterials-13-01818-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/7b01bd2e24bf/nanomaterials-13-01818-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/27c8490774cd/nanomaterials-13-01818-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/629e1c82691a/nanomaterials-13-01818-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/dc7ed034e599/nanomaterials-13-01818-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/484fccf10d75/nanomaterials-13-01818-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/58c57108109c/nanomaterials-13-01818-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/9308e17152fb/nanomaterials-13-01818-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/f8f33ac7c466/nanomaterials-13-01818-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/95bcf670b943/nanomaterials-13-01818-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/a2365ac5abb0/nanomaterials-13-01818-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10301502/721ac7102308/nanomaterials-13-01818-g015.jpg

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