Yoo Eun Ji, Shin Il Kwon, Yoon Tae Sik, Choi Young Jin, Kang Chi Jung
J Nanosci Nanotechnol. 2014 Dec;14(12):9459-64. doi: 10.1166/jnn.2014.10157.
Binary transition metal oxides such as ZnO, TiO2, and MnO; and their various structures such as thin film, nanowire, and nanoparticle assembly; have been widely investigated for use in insulators in resistive random access memory (ReRAM), considered a next-generation nonvolatile memory device. Among the various driving mechanisms of resistive switching in insulating materials, the conductive filament model is one of the most widely accepted. Studies on spatially confined structures such as one-dimensional nanostructures and zero-dimensional nanoparticles to reveal the detailed filament constructing mechanism are warranted because low-dimensional nanostructures can provide more localized properties with a narrow dispersion of operational parameter values compared with thin-film structures. We investigated the resistive switching characteristics of ZnO nanowire (NW) structures. The NWs were grown on an Au/Ti/SiO2/Si substrate via the hydrothermal method. The empty space between the top and bottom electrodes was filled with a photoresist to prevent direct connection between the electrodes. The top electrode (Cr) and bottom electrode (Au), both with a thickness of -100 nm, were deposited by DC sputtering. The current-voltage (I-V) measurements were performed using a semiconductor characterization system. Additionally, the local current image and the point I-V characteristics for each NW were examined by replacing the top electrode with a conducting atomic force microscope tip. The Au-ZnO NW-Cr devices exhibited bipolar resistive switching behavior.
二元过渡金属氧化物,如氧化锌(ZnO)、二氧化钛(TiO₂)和二氧化锰(MnO);以及它们的各种结构,如薄膜、纳米线和纳米颗粒组件;已被广泛研究用于电阻式随机存取存储器(ReRAM)中的绝缘体,ReRAM被认为是一种下一代非易失性存储器件。在绝缘材料中电阻开关的各种驱动机制中,导电细丝模型是最被广泛接受的模型之一。对一维纳米结构和零维纳米颗粒等空间受限结构进行研究以揭示细丝构建的详细机制是有必要的,因为与薄膜结构相比,低维纳米结构可以提供更局部化的特性,且操作参数值的分散性较窄。我们研究了氧化锌纳米线(NW)结构的电阻开关特性。通过水热法在金/钛/二氧化硅/硅衬底上生长纳米线。顶部和底部电极之间的空隙用光刻胶填充,以防止电极之间直接连接。通过直流溅射沉积厚度均为-100纳米的顶部电极(铬)和底部电极(金)。使用半导体表征系统进行电流-电压(I-V)测量。此外,通过用导电原子力显微镜尖端替换顶部电极,检查了每根纳米线的局部电流图像和点I-V特性。金-氧化锌纳米线-铬器件表现出双极电阻开关行为。