Liu Jing, Zhang Xinshuai, Dong Gangqiang, Liao Yuanxun, Wang Bo, Zhang Tianchong, Yi Futing
J Nanosci Nanotechnol. 2015 Jan;15(1):236-40. doi: 10.1166/jnn.2015.7935.
A simple fabrication technology for both nanoscrews and nanoholes by Cesium Chloride (CsCI) self-assembly lithography and dry etching on silicon substrates is demonstrated. The porous Al template ranging from 400 nm to 2 μm average diameter is formed by lift-off the CsCl nanoislands in DI water as the ICP etching masks for nanoholes. Nanoscrews and nanoholes of desired height/depth from 1.2 to 4 μm are obtained by this method. The reflectance of nanoscrew and nanohole structures can achieve below 5% from wavelength of 400 to 1000 nm which is much lower than that of pyramid but the performance of pyramid solar cells is the best. Results show that the performance of nanoscrew and nanohole solar cells is strongly affected by some other factors such as surface passivation and electrode-contact property. Therefore, not only the antireflection advantage but also the surface passivation and improving the electrode-contact property should be considered together to improve nanostructure solar cells photovoltaic performance.
展示了一种通过氯化铯（CsCI）自组装光刻和在硅衬底上进行干法蚀刻来制造纳米螺丝和纳米孔的简单技术。通过在去离子水中去除CsCl纳米岛作为纳米孔的电感耦合等离子体（ICP）蚀刻掩膜，形成平均直径在400纳米至2微米范围内的多孔铝模板。通过这种方法可获得所需高度/深度为1.2至4微米的纳米螺丝和纳米孔。纳米螺丝和纳米孔结构在400至1000纳米波长范围内的反射率可达到5%以下，这比金字塔结构的反射率低得多，但金字塔太阳能电池的性能最佳。结果表明，纳米螺丝和纳米孔太阳能电池的性能受到诸如表面钝化和电极接触特性等其他一些因素的强烈影响。因此，为了提高纳米结构太阳能电池的光伏性能，不仅应考虑抗反射优势，还应同时考虑表面钝化和改善电极接触特性。
