Microelectronics Research Center, The University of Texas at Austin , Austin, Texas 78758, United States.
National Institute of Materials Science , 1-1 Namiki, Tsukuba, 305-044, Japan.
ACS Nano. 2015 Oct 27;9(10):10402-10. doi: 10.1021/acsnano.5b04611. Epub 2015 Sep 14.
We demonstrate dual-gated p-type field-effect transistors (FETs) based on few-layer tungsten diselenide (WSe2) using high work-function platinum source/drain contacts and a hexagonal boron nitride top-gate dielectric. A device topology with contacts underneath the WSe2 results in p-FETs with ION/IOFF ratios exceeding 10(7) and contacts that remain ohmic down to cryogenic temperatures. The output characteristics show current saturation and gate tunable negative differential resistance. The devices show intrinsic hole mobilities around 140 cm(2)/(V s) at room temperature and approaching 4000 cm(2)/(V s) at 2 K. Temperature-dependent transport measurements show a metal-insulator transition, with an insulating phase at low densities and a metallic phase at high densities. The mobility shows a strong temperature dependence consistent with phonon scattering, and saturates at low temperatures, possibly limited by Coulomb scattering or defects.
我们展示了基于少层二硒化钨(WSe2)的双栅 p 型场效应晶体管(FET),使用高功函数的铂源/漏接触和六方氮化硼顶层栅介质。采用在 WSe2 下方设置接触的器件结构,可获得 ION/IOFF 比值超过 10(7)的 p-FET,且接触在低温下仍保持欧姆接触。输出特性显示出电流饱和和栅可调负微分电阻。这些器件在室温下的本征空穴迁移率约为 140 cm(2)/(V s),在 2 K 时接近 4000 cm(2)/(V s)。温度相关的输运测量显示出金属-绝缘体转变,在低密度下为绝缘相,在高密度下为金属相。迁移率表现出与声子散射一致的强烈温度依赖性,并在低温下饱和,可能受到库仑散射或缺陷的限制。