Jang Jongjin, Woo Seohwi, Min Daehong, Nam Okhyun
J Nanosci Nanotechnol. 2015 Mar;15(3):1895-906. doi: 10.1166/jnn.2015.10327.
The III-nitrides have attracted much attention because of their applicability in optoelectronic devices, whose emission wavelengths range from green to ultraviolet light due to their wide band gap. However, conventional c-plane GaN-based devices are influenced significantly by spontaneous and piezoelectric polarization effects, which could pose a limitation for increased luminous efficiency as a result of the quantum confined stark effect. Since the early 2000s, many groups have tried to solve these problems by examining the growth of GaN on non- or semipolar surface planes. High power non- and semipolar LEDs can be realized by the growth of a thick active layer. In addition, it is expected that it is possible to grow nonpolar InGaN LEDs with high quality p-GaN layers due to lower hole activation energy, and also long-wavelength semipolar InGaN LEDs because of the capacity for high indium incorporation in the quantum wells (QWs). However, non- and semipolar structures grown on sapphire substrate usually contain a high density of basal stacking faults and threading dislocations. For this reason, the growth of non- and semipolar GaN-based LEDs on a sapphire substrate has been attempted through the introduction of defect reduction techniques such as epitaxial lateral overgrowth, patterned sapphire substrate and re-growth techniques on a porous GaN layer, etc. Also, some researchers have grown high quality non- and semipolar GaN-based LEDs using non- and semipolar freestanding GaN substrates. In this review paper, we introduce and discuss recent progress in the development of non- and semipolar GaN-based LEDs and freestanding GaN substrates.
由于Ⅲ族氮化物在光电器件中的应用,它们受到了广泛关注。由于其宽带隙,这些光电器件的发射波长范围从绿光到紫外光。然而,传统的c面氮化镓基器件受到自发极化和压电极化效应的显著影响,由于量子限制斯塔克效应,这可能会限制发光效率的提高。自21世纪初以来,许多研究小组试图通过研究在非极性或半极性表面平面上生长氮化镓来解决这些问题。通过生长厚的有源层可以实现高功率非极性和半极性发光二极管。此外,由于较低的空穴激活能,有望生长出具有高质量p型氮化镓层的非极性氮化铟镓发光二极管,并且由于量子阱中能够高铟掺入,还能生长出长波长半极性氮化铟镓发光二极管。然而,在蓝宝石衬底上生长的非极性和半极性结构通常包含高密度的基面堆垛层错和位错。因此,通过引入缺陷减少技术,如外延横向生长、图案化蓝宝石衬底以及在多孔氮化镓层上的再生长技术等,尝试在蓝宝石衬底上生长非极性和半极性氮化镓基发光二极管。此外,一些研究人员使用非极性和半极性自支撑氮化镓衬底生长出了高质量的非极性和半极性氮化镓基发光二极管。在这篇综述文章中,我们介绍并讨论了非极性和半极性氮化镓基发光二极管以及自支撑氮化镓衬底发展的最新进展。