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基于可控缺陷高频热丝化学气相沉积石墨烯的柔性压力传感器中的压阻效应

Piezoresistive effects in controllable defective HFTCVD graphene-based flexible pressure sensor.

作者信息

Mohammad Haniff Muhammad Aniq Shazni, Muhammad Hafiz Syed, Wahid Khairul Anuar Abd, Endut Zulkarnain, Wah Lee Hing, Bien Daniel C S, Abdul Azid Ishak, Abdullah Mohd Zulkifly, Ming Huang Nay, Abdul Rahman Saadah

机构信息

Nanoelectronics Lab, MIMOS Berhad, Technology Park Malaysia, Kuala Lumpur 57000, Malaysia.

School of Mechanical Engineering, USM Engineering Campus, Universiti Sains Malaysia, Nibong Tebal, Pulau Pinang 14300, Malaysia.

出版信息

Sci Rep. 2015 Oct 1;5:14751. doi: 10.1038/srep14751.

Abstract

In this work, the piezoresistive effects of defective graphene used on a flexible pressure sensor are demonstrated. The graphene used was deposited at substrate temperatures of 750, 850 and 1000 °C using the hot-filament thermal chemical vapor deposition method in which the resultant graphene had different defect densities. Incorporation of the graphene as the sensing materials in sensor device showed that a linear variation in the resistance change with the applied gas pressure was obtained in the range of 0 to 50 kPa. The deposition temperature of the graphene deposited on copper foil using this technique was shown to be capable of tuning the sensitivity of the flexible graphene-based pressure sensor. We found that the sensor performance is strongly dominated by the defect density in the graphene, where graphene with the highest defect density deposited at 750 °C exhibited an almost four-fold sensitivity as compared to that deposited at 1000 °C. This effect is believed to have been contributed by the scattering of charge carriers in the graphene networks through various forms such as from the defects in the graphene lattice itself, tunneling between graphene islands, and tunneling between defect-like structures.

摘要

在这项工作中,展示了用于柔性压力传感器的缺陷石墨烯的压阻效应。所使用的石墨烯是通过热丝热化学气相沉积法在750、850和1000℃的衬底温度下沉积的,由此得到的石墨烯具有不同的缺陷密度。将石墨烯作为传感材料掺入传感器器件中表明,在0至50kPa的范围内,电阻变化随施加的气压呈线性变化。使用该技术沉积在铜箔上的石墨烯的沉积温度被证明能够调节基于石墨烯的柔性压力传感器的灵敏度。我们发现,传感器性能在很大程度上由石墨烯中的缺陷密度决定,其中在750℃沉积的具有最高缺陷密度的石墨烯与在1000℃沉积的相比,灵敏度几乎高出四倍。据信这种效应是由石墨烯网络中电荷载流子通过各种形式的散射造成的,这些形式包括来自石墨烯晶格本身的缺陷、石墨烯岛之间的隧穿以及类缺陷结构之间的隧穿。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1c84/4589683/03f8020f9c42/srep14751-f1.jpg

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