Han Shuqi, Zhou Siyuan, Mei Linyu, Guo Miaoli, Zhang Huiyi, Li Qiannan, Zhang Shuai, Niu Yaokai, Zhuang Yan, Geng Wenping, Bi Kaixi, Chou Xiujian
School of Instrument Science and Technology, North University of China, Taiyuan 030051, China.
Key Laboratory of National Defense Science and Technology on Electronic Measurement, School of Instrument and Electronics, North University of China, Taiyuan 030051, China.
Nanomaterials (Basel). 2023 Mar 19;13(6):1103. doi: 10.3390/nano13061103.
The substrate impurities scattering will lead to unstable temperature-sensitive behavior and poor linearity in graphene temperature sensors. And this can be weakened by suspending the graphene structure. Herein, we report a graphene temperature sensing structure, with suspended graphene membranes fabricated on the cavity and non-cavity SiO/Si substrate, using monolayer, few-layer, and multilayer graphene. The results show that the sensor provides direct electrical readout from temperature to resistance transduction by the nano piezoresistive effect in graphene. And the cavity structure can weaken the substrate impurity scattering and thermal resistance effect, which results in better sensitivity and wide-range temperature sensing. In addition, monolayer graphene is almost no temperature sensitivity. And the few-layer graphene temperature sensitivity, lower than that of the multilayer graphene cavity structure (3.50%/°C), is 1.07%/°C. This work demonstrates that piezoresistive in suspended graphene membranes can effectively enhance the sensitivity and widen the temperature sensor range in NEMS temperature sensors.
衬底杂质散射会导致石墨烯温度传感器出现不稳定的温度敏感行为和较差的线性度。而通过悬空石墨烯结构可以减弱这种情况。在此,我们报道一种石墨烯温度传感结构,其在有腔和无腔的SiO/Si衬底上制备了悬空的石墨烯膜,使用了单层、少层和多层石墨烯。结果表明,该传感器通过石墨烯中的纳米压阻效应提供从温度到电阻转换的直接电读出。并且腔结构可以减弱衬底杂质散射和热阻效应,从而实现更好的灵敏度和宽范围温度传感。此外,单层石墨烯几乎没有温度敏感性。少层石墨烯的温度灵敏度为1.07%/°C,低于多层石墨烯腔结构的温度灵敏度(3.50%/°C)。这项工作表明,悬空石墨烯膜中的压阻效应可以有效提高NEMS温度传感器的灵敏度并拓宽温度传感器的范围。