Department of Mechanical Engineering and the Materials Science and Engineering Program, The University of Texas at Austin , 1 University Station C2200, Austin, Texas 78712, United States.
ACS Nano. 2013 Sep 24;7(9):7495-9. doi: 10.1021/nn4031564. Epub 2013 Aug 16.
Scaling graphene growth using an oven to heat large substrates becomes less energy efficient as system size is increased. We report a route to graphene synthesis in which radio frequency (RF) magnetic fields inductively heat metal foils, yielding graphene of quality comparable to or higher than that of current chemical vapor deposition techniques. RF induction heating allows for rapid temperature ramp up/down, with great potential for large scale and rapid manufacturing of graphene with much better energy efficiency. Back-gated field effect transistors on a SiO2/Si substrate showed carrier mobility up to ∼14 000 cm(2) V(-1) s(-1) measured under ambient conditions. Many advantages of RF heating are outlined, and some fundamental aspects of this approach are discussed.
使用烤箱对大衬底进行加热以扩大石墨烯的生长规模,随着系统尺寸的增加,其效率会降低。我们报告了一种使用射频(RF)磁场感应加热金属箔来合成石墨烯的方法,得到的石墨烯质量与当前的化学气相沉积技术相当,甚至更高。RF 感应加热可实现快速的温度升降,有望实现大规模、快速制造石墨烯,且具有更高的能源效率。在 SiO2/Si 衬底上的背栅场效应晶体管在环境条件下测量的载流子迁移率高达约 14000 cm2 V-1 s-1。文中概述了 RF 加热的许多优点,并讨论了该方法的一些基本方面。