Shevlyagin A V, Goroshko D L, Chusovitin E A, Galkin K N, Galkin N G, Gutakovskii A K
Institute of Automation and Control Processes FEB RAS, Radio St. 5, 690041 Vladivostok, Russia.
Far Eastern Federal University, School of Natural Sciences, Sukhanova St. 8, 690950 Vladivostok, Russia.
Sci Rep. 2015 Oct 5;5:14795. doi: 10.1038/srep14795.
By using solid phase epitaxy of thin Fe films and molecular beam epitaxy of Si, a p(+)-Si/p-Si/β-FeSi2 nanocrystallites/n-Si(111) diode structure was fabricated. Transmission electron microscopy data confirmed a well-defined multilayered structure with embedded nanocrystallites of two typical sizes: 3-4 and 15-20 nm, and almost coherent epitaxy of the nanocrystallites with the Si matrix. The diode at zero bias conditions exhibited a current responsivity of 1.7 mA/W, an external quantum efficiency of about 0.2%, and a specific detectivity of 1.2 × 10(9) cm × Hz(1/2)/W at a wavelength of 1300 nm at room temperature. In the avalanche mode, the responsivity reached up to 20 mA/W (2% in terms of efficiency) with a value of avalanche gain equal to 5. The data obtained indicate that embedding of β-FeSi2 nanocrystallites into the depletion region of the Si p-n junction results in expansion of the spectral sensitivity up to 1600 nm and an increase of the photoresponse by more than two orders of magnitude in comparison with a conventional Si p-n junction. Thereby, fabricated structure combines advantage of the silicon photodiode functionality and simplicity with near infrared light detection capability of β-FeSi2.
通过使用铁薄膜的固相外延和硅的分子束外延,制备了一种p(+)-Si/p-Si/β-FeSi2纳米微晶/n-Si(111)二极管结构。透射电子显微镜数据证实了具有两种典型尺寸(3 - 4纳米和15 - 20纳米)的嵌入纳米微晶的明确多层结构,以及纳米微晶与硅基体的几乎相干外延。该二极管在零偏置条件下,在室温下波长为1300纳米时,表现出1.7毫安/瓦的电流响应度、约0.2%的外部量子效率和1.2×10(9)厘米×赫兹(1/2)/瓦的比探测率。在雪崩模式下,响应度达到20毫安/瓦(效率方面为2%),雪崩增益值等于5。所获得的数据表明,将β-FeSi2纳米微晶嵌入硅p-n结的耗尽区会导致光谱灵敏度扩展到1600纳米,并且与传统硅p-n结相比,光响应增加了两个多数量级。因此,所制备的结构结合了硅光电二极管功能和简单性的优点以及β-FeSi2的近红外光探测能力。