用于癌症检测的基于大面积微机电系统的超声设备
Large Area MEMS Based Ultrasound Device for Cancer Detection.
作者信息
Wodnicki Robert, Thomenius Kai, Hooi Fong Ming, Sinha Sumedha P, Carson Paul L, Lin Der-Song, Zhuang Xuefeng, Khuri-Yakub Pierre, Woychik Charles
机构信息
GE Global Research, 1 Research Circle, Niskayuna, NY,12309,USA.
Radiology and Biomedical Engineering, University of Michigan, Ann Arbor, MI 48109, USA.
出版信息
Nucl Instrum Methods Phys Res A. 2011 Aug 21;648(Suppl 1):S135-8. doi: 10.1016/j.nima.2010.12.067.
We present image results obtained using a prototype ultrasound array which demonstrates the fundamental architecture for a large area MEMS based ultrasound device for detection of breast cancer. The prototype array consists of a tiling of capacitive Micro-Machined Ultrasound Transducers (cMUTs) which have been flip-chip attached to a rigid organic substrate. The pitch on the cMUT elements is 185 um and the operating frequency is nominally 9 MHz. The spatial resolution of the new probe is comparable to production PZT probes, however the sensitivity is reduced by conditions that should be correctable. Simulated opposed-view image registration and Speed of Sound volume reconstruction results for ultrasound in the mammographic geometry are also presented.
我们展示了使用原型超声阵列获得的图像结果，该阵列展示了一种基于大面积微机电系统（MEMS）的用于乳腺癌检测的超声设备的基本架构。该原型阵列由电容式微机械超声换能器（cMUT）平铺而成，这些换能器已倒装芯片连接到刚性有机基板上。cMUT元件的间距为185微米，标称工作频率为9兆赫。新探头的空间分辨率与生产中的压电陶瓷（PZT）探头相当，然而，灵敏度因一些应可校正的条件而降低。还展示了乳腺X线摄影几何形状中超声的模拟对视图图像配准和声速体积重建结果。
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