Jogschies Lisa, Klaas Daniel, Kruppe Rahel, Rittinger Johannes, Taptimthong Piriya, Wienecke Anja, Rissing Lutz, Wurz Marc Christopher
Institute of Micro Production Technology, Centre for Production Technology, Leibniz Universitaet Hannover, Garbsen 30823, Germany.
Sensors (Basel). 2015 Nov 12;15(11):28665-89. doi: 10.3390/s151128665.
The research and development in the field of magnetoresistive sensors has played an important role in the last few decades. Here, the authors give an introduction to the fundamentals of the anisotropic magnetoresistive (AMR) and the giant magnetoresistive (GMR) effect as well as an overview of various types of sensors in industrial applications. In addition, the authors present their recent work in this field, ranging from sensor systems fabricated on traditional substrate materials like silicon (Si), over new fabrication techniques for magnetoresistive sensors on flexible substrates for special applications, e.g., a flexible write head for component integrated data storage, micro-stamping of sensors on arbitrary surfaces or three dimensional sensing under extreme conditions (restricted mounting space in motor air gap, high temperatures during geothermal drilling).
在过去几十年里,磁阻传感器领域的研发发挥了重要作用。在此,作者介绍了各向异性磁阻(AMR)和巨磁阻(GMR)效应的基本原理,以及工业应用中各类传感器的概况。此外,作者还展示了他们在该领域的最新工作,内容涵盖在传统衬底材料(如硅(Si))上制造的传感器系统,到用于特殊应用的柔性衬底上磁阻传感器的新制造技术,例如用于组件集成数据存储的柔性写头、在任意表面上进行传感器微冲压或在极端条件下(电机气隙中安装空间受限、地热钻探期间温度高)的三维传感。