多通道石英晶体微天平阵列：制备、评估及其在生物标志物检测中的应用

Multichannel quartz crystal microbalance array: Fabrication, evaluation, application in biomarker detection.

作者信息

Tao Wenyan, Lin Peng, Ai Yanqing, Wang Hairui, Ke Shanming, Zeng Xierong

机构信息

Shenzhen Key Laboratory of Special Functional Materials & Shenzhen Engineering Laboratory for Advance Technology of Ceramics, College of Materials Science and Engineering, Shenzhen University, Shenzhen, China; Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Optoelectronic Engineering, Shenzhen University, Shenzhen, China.

出版信息

Anal Biochem. 2016 Feb 1;494:85-92. doi: 10.1016/j.ab.2015.11.001. Epub 2015 Nov 12.

DOI:10.1016/j.ab.2015.11.001

PMID:26582433

Abstract

A multichannel quartz crystal microbalance array (MQCM) with three pairs of gold electrodes was fabricated for detection of two biomarkers: acetone and nitric oxide (NO). The gold electrodes were deposited symmetrically on an AT-cut 10 MHz circular quartz plate using photolithography, sputtering, and lift-off technologies. The effect of gold layer thickness on MQCM performance was investigated and the optimized thickness was 101 nm. The simulation values of the electric parameters C0, Cq, Lq, and Rq in the Butterworth-Van Dike equivalent circuit for the MQCM device were 97 pF, 1.3 pF, 1.05 mH, and 9.8 Ω, respectively. Simulation values were in the theoretical range, which indicated that the fabricated MQCM device had good resonance performance. Two types of nanocomposites, titanium dioxide-multiwalled carbon nanotubes and cobalt (II)phthalocyanine-silica, were synthesized as sensing materials. The sensing mechanism is based on coordination adsorption of target molecules onto the sensing material, resulting in a resonant frequency shift of modified QCM sensor. A linear range from 4.33 to 129.75 ppmv for acetone was obtained and one from 5.75 to 103.45 ppbv for NO.

摘要

制备了一种具有三对金电极的多通道石英晶体微天平阵列（MQCM），用于检测两种生物标志物：丙酮和一氧化氮（NO）。采用光刻、溅射和剥离技术，将金电极对称沉积在AT切割的10 MHz圆形石英板上。研究了金层厚度对MQCM性能的影响，优化厚度为101 nm。MQCM器件的巴特沃斯-范戴克等效电路中电参数C0、Cq、Lq和Rq的仿真值分别为97 pF、1.3 pF、1.05 mH和9.8 Ω。仿真值在理论范围内，表明所制备的MQCM器件具有良好的谐振性能。合成了两种纳米复合材料，二氧化钛-多壁碳纳米管和钴（II）酞菁-二氧化硅作为传感材料。传感机制基于目标分子在传感材料上的配位吸附，导致修饰后的QCM传感器谐振频率发生偏移。丙酮的线性范围为4.33至129.75 ppmv，NO的线性范围为5.75至103.45 ppbv。