Fimberger Martin, Behrendt Andreas, Jakopic Georg, Stelzer Franz, Kumbaraci Volkan, Wiesbrock Frank
Polymer Competence Center Leoben GmbH PCCL, Roseggerstrasse 12, 8700, Leoben, Austria.
Institute for Chemistry and Technology of Materials, Graz University of Technology, NAWI Graz, Stremayrgasse 9/V, 8010, Graz, Austria.
Macromol Rapid Commun. 2016 Feb;37(3):233-8. doi: 10.1002/marc.201500589. Epub 2015 Nov 30.
Chromophore-functionalized copoly(2-oxazoline)s are successfully evaluated as bottom antireflective coatings (BARCs) in high-resolution photolithography. With respect to UV light sources used in photolithographic production routines, anthracene is chosen as a chromophore. For application as polymer in BARCs, the copolymer poly(2-ethyl-2-oxazolin)45 -stat-poly(2-dec-9'-enyl-2-oxazolin)20 -stat-poly(2-(3'-(1"-(anthracen-9-ylmethyl)-1",2",3"-triazol-4-yl)propyl)-2-oxazolin)35 can be synthesized by the Huisgen cycloaddition click reaction of the copolymer poly(2-ethyl-2-oxazolin)45 -stat-poly(2-dec-9'-enyl-2-oxazolin)20 -stat-poly(2-pent-4'-inyl-2-oxazolin)35 and the corresponding azide-functionalized anthracenes. These copolymers can be crosslinked by the thermally induced thiol-ene reaction involving the unsaturated C=C bonds of the poly(2-dec-9'-enyl-2-oxazoline) repetition units and a multifunctional thiol as crosslinker. Tests of this BARC in a clean room under production conditions reveal a significant decrease of the swing-curve of a chemically amplified positive photoresist by more than 50%, hence significantly increasing the resolution of the photoresist.
发色团功能化的共聚（2-恶唑啉）被成功评估为高分辨率光刻中的底部抗反射涂层（BARC）。对于光刻生产流程中使用的紫外光源，选择蒽作为发色团。为了作为聚合物应用于BARC，共聚物聚（2-乙基-2-恶唑啉）45 -无规-聚（2-癸-9'-烯基-2-恶唑啉）20 -无规-聚（2-（3' -（1" -（蒽-9-基甲基）-1",2",3"-三唑-4-基）丙基）-2-恶唑啉）35可通过共聚物聚（2-乙基-2-恶唑啉）45 -无规-聚（2-癸-9'-烯基-2-恶唑啉）20 -无规-聚（2-戊-4'-炔基-2-恶唑啉）35与相应的叠氮化物功能化蒽的Huisgen环加成点击反应合成。这些共聚物可通过涉及聚（2-癸-9'-烯基-2-恶唑啉）重复单元的不饱和C=C键和多功能硫醇作为交联剂的热诱导硫醇-烯反应进行交联。在生产条件下的洁净室中对这种BARC进行测试发现，化学放大正性光刻胶的摆动曲线显著降低了50%以上，从而显著提高了光刻胶的分辨率。
