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用于人体运动监测的高灵敏度硅基柔性应变传感器的大规模组装。

Large-scale assembly of highly sensitive Si-based flexible strain sensors for human motion monitoring.

作者信息

Zhang Bing-Chang, Wang Hui, Zhao Yu, Li Fan, Ou Xue-Mei, Sun Bao-Quan, Zhang Xiao-Hong

机构信息

Nano-organic Photoelectronic Laboratory and Key Laboratory of Photochemical Conversion and Optoelectronic Materials, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, 100190 Beijing, China.

Institute of Functional Nano and Soft Materials (FUNSOM), Jiangsu Key Laboratory of Carbon-based Functional Materials and Devices, and Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, 215123 Suzhou, Jiangsu, China.

出版信息

Nanoscale. 2016 Jan 28;8(4):2123-8. doi: 10.1039/c5nr07546g.

DOI:10.1039/c5nr07546g
PMID:26725832
Abstract

Silicon is the dominant semiconductor in modern society, but the rigid nature of most Si structures hinders its applications in flexible electronics. In this work, Si-based flexible strain sensors are fabricated with Si fabric consisting of long Si nanowires. The as-obtained sensors demonstrate a large strain range of 50% and a gauge factor of up to 350, which are sufficient to detect human motions with superior performance over traditional sensors. The results reveal that the assembling strategy may potentially be applied to large-scale fabrication of highly sensitive, flexible strain sensors for emerging applications such as healthcare and sports monitoring. Moreover, the Si fabric would also enable broad applications of Si materials in other flexible and wearable devices such as flexible optoelectronics and displays.

摘要

硅是现代社会中的主要半导体,但大多数硅结构的刚性阻碍了其在柔性电子学中的应用。在这项工作中,基于硅的柔性应变传感器是用由长硅纳米线组成的硅织物制造的。所获得的传感器展现出50%的大应变范围和高达350的应变系数,这足以检测人体运动,其性能优于传统传感器。结果表明,这种组装策略可能潜在地应用于大规模制造用于医疗保健和运动监测等新兴应用的高灵敏度、柔性应变传感器。此外,硅织物还将使硅材料在其他柔性和可穿戴设备(如柔性光电子学和显示器)中得到广泛应用。

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