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用于透明显示器的非晶态金属氧化物基薄膜晶体管中光致稳定性的提升

Improved Photo-Induced Stability in Amorphous Metal-Oxide Based TFTs for Transparent Displays.

作者信息

Koo Sang-Mo, Ha Tae-Jun

出版信息

J Nanosci Nanotechnol. 2015 Oct;15(10):7800-3. doi: 10.1166/jnn.2015.11193.

Abstract

In this paper, we investigate the origin of photo-induced instability in amorphous metal-oxide based thin-film transistors (oxide-TFTs) by exploring threshold voltage (Vth) shift in transfer characteristics. The combination of photo irradiation and prolonged gate bias stress enhanced the shift in Vth in amorphous hafnium-indium-zinc-oxide (a-HfIZO) TFTs. Such results stem from the extended trapped charges at the localized defect states related to oxygen vacancy which play a role in a screening effect on the electric field induced by gate voltage. We also demonstrate the chemically clean interface in oxide-TFTs by employing oxygen annealing which reduces the density of trap states, thereby resulting in improved photo-induced stability. We believe that this work stimulates the research society of transparent electronics by providing a promising approach to suppress photo-induced instability in metal-oxide TFTs.

摘要

在本文中,我们通过研究转移特性中的阈值电压(Vth)偏移,来探究基于非晶金属氧化物的薄膜晶体管(氧化物-TFT)中光致不稳定性的起源。光照射和长时间栅极偏置应力的结合增强了非晶铪-铟-锌氧化物(a-HfIZO)TFT中Vth的偏移。这些结果源于与氧空位相关的局域缺陷态处扩展的俘获电荷,这些电荷在对栅极电压感应的电场的屏蔽效应中起作用。我们还通过采用氧退火来证明氧化物-TFT中的化学清洁界面,氧退火降低了陷阱态密度,从而提高了光致稳定性。我们相信,这项工作通过提供一种有前景的方法来抑制金属氧化物TFT中的光致不稳定性,从而推动了透明电子学研究领域的发展。

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