Koo Sang-Mo, Ha Tae-Jun
J Nanosci Nanotechnol. 2015 Oct;15(10):7800-3. doi: 10.1166/jnn.2015.11193.
In this paper, we investigate the origin of photo-induced instability in amorphous metal-oxide based thin-film transistors (oxide-TFTs) by exploring threshold voltage (Vth) shift in transfer characteristics. The combination of photo irradiation and prolonged gate bias stress enhanced the shift in Vth in amorphous hafnium-indium-zinc-oxide (a-HfIZO) TFTs. Such results stem from the extended trapped charges at the localized defect states related to oxygen vacancy which play a role in a screening effect on the electric field induced by gate voltage. We also demonstrate the chemically clean interface in oxide-TFTs by employing oxygen annealing which reduces the density of trap states, thereby resulting in improved photo-induced stability. We believe that this work stimulates the research society of transparent electronics by providing a promising approach to suppress photo-induced instability in metal-oxide TFTs.
在本文中,我们通过研究转移特性中的阈值电压(Vth)偏移,来探究基于非晶金属氧化物的薄膜晶体管(氧化物-TFT)中光致不稳定性的起源。光照射和长时间栅极偏置应力的结合增强了非晶铪-铟-锌氧化物(a-HfIZO)TFT中Vth的偏移。这些结果源于与氧空位相关的局域缺陷态处扩展的俘获电荷,这些电荷在对栅极电压感应的电场的屏蔽效应中起作用。我们还通过采用氧退火来证明氧化物-TFT中的化学清洁界面,氧退火降低了陷阱态密度,从而提高了光致稳定性。我们相信,这项工作通过提供一种有前景的方法来抑制金属氧化物TFT中的光致不稳定性,从而推动了透明电子学研究领域的发展。