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正偏压应力不稳定性对阈值电压的依赖性及其在溶液法制备的掺铝氧化铟薄膜晶体管中的起源

Dependence of Positive Bias Stress Instability on Threshold Voltage and Its Origin in Solution-Processed Aluminum-Doped Indium Oxide Thin-Film Transistors.

作者信息

Na Jeong-Hyeon, Park Jun-Hyeong, Park Won, Feng Junhao, Eun Jun-Su, Lee Jinuk, Lee Sin-Hyung, Jang Jaewon, Kang In Man, Kim Do-Kyung, Bae Jin-Hyuk

机构信息

School of Electronic and Electrical Engineering, Kyungpook National University, 80 Daehakro, Bukgu, Daegu 41566, Republic of Korea.

出版信息

Nanomaterials (Basel). 2024 Mar 4;14(5):466. doi: 10.3390/nano14050466.

Abstract

The initial electrical characteristics and bias stabilities of thin-film transistors (TFTs) are vital factors regarding the practical use of electronic devices. In this study, the dependence of positive bias stress (PBS) instability on an initial threshold voltage (V) and its origin were analyzed by understanding the roles of slow and fast traps in solution-processed oxide TFTs. To control the initial V of oxide TFTs, the indium oxide (InO) semiconductor was doped with aluminum (Al), which functioned as a carrier suppressor. The concentration of oxygen vacancies decreased as the Al doping concentration increased, causing a positive V shift in the InO TFTs. The V shift (∆V) caused by PBS increased exponentially when V was increased, and a distinct tendency was observed as the gate bias stress increased due to a high vertical electric field in the oxide dielectric. In addition, the recovery behavior was analyzed to reveal the influence of fast and slow traps on ∆V by PBS. Results revealed that the effect of the slow trap increased as the V moved in the positive direction; this occured because the main electron trap location moved away from the interface as the Fermi level approached the conduction band minimum. Understanding the correlation between V and PBS instability can contribute to optimizing the fabrication of oxide TFT-based circuits for electronic applications.

摘要

薄膜晶体管(TFT)的初始电学特性和偏置稳定性是影响电子设备实际应用的关键因素。在本研究中,通过了解溶液处理氧化物TFT中慢陷阱和快陷阱的作用,分析了正偏压应力(PBS)不稳定性对初始阈值电压(V)的依赖性及其起源。为了控制氧化物TFT的初始V,氧化铟(InO)半导体被铝(Al)掺杂,铝起到载流子抑制作用。随着Al掺杂浓度的增加,氧空位浓度降低,导致InO TFT的V正向偏移。当V增加时,由PBS引起的V偏移(∆V)呈指数增加,并且由于氧化物电介质中的高垂直电场,随着栅极偏压应力增加,观察到明显的趋势。此外,通过分析恢复行为来揭示快陷阱和慢陷阱对PBS引起的∆V的影响。结果表明,随着V向正方向移动,慢陷阱的影响增加;这是因为随着费米能级接近导带最小值,主要电子陷阱位置远离界面。了解V与PBS不稳定性之间的相关性有助于优化基于氧化物TFT的电子应用电路的制造。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6343/10934793/2633aa14ebef/nanomaterials-14-00466-g001.jpg

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