Kim Hwa-Min, Litao Yao, Kim Bonghwan
J Nanosci Nanotechnol. 2015 Nov;15(11):8521-6. doi: 10.1166/jnn.2015.11470.
We have developed a surface texturing process for pyramidal surface features along with an indium tin oxide (ITO) coating process to fabricate super-hydrophilic conductive surfaces. The contact angle of a water droplet was less than 5 degrees, which means that an extremely high wettability is achievable on super-hydrophilic surfaces. We have also fabricated a super-hydrophobic conductive surface using an additional coating of polytetrafluoroethylene (PTFE) on the ITO layer coated on the textured Si surface; the ITO and PTFE films were deposited by using a conventional sputtering method. We found that a super-hydrophilic conductive surface is produced by ITO coated on the pyramidal Si surface (ITO/Si), with contact angles of approximately 0 degrees and a resistivity of 3 x 10(-4) Ω x cm. These values are highly dependent on the substrate temperature during the sputtering process. We also found that the super-hydrophobic conductive surface produced by the additional coating of PTFE on the pyramidal Si surface with an ITO layer (PTFE/ITO/Si) has a contact angle of almost 160 degrees and a resistivity of 3 x 10(-4) Ω x cm, with a reflectance lower than 9%. Therefore, these processes can be used to fabricate multifunctional features of ITO films for switchable super-hydrophilic and super-hydrophobic surfaces.
我们开发了一种用于制造金字塔形表面特征的表面纹理化工艺，以及一种铟锡氧化物（ITO）涂层工艺，以制备超亲水导电表面。水滴的接触角小于5度，这意味着在超亲水表面可实现极高的润湿性。我们还通过在纹理化硅表面涂覆的ITO层上额外涂覆聚四氟乙烯（PTFE）来制备超疏水导电表面；ITO和PTFE薄膜通过传统溅射方法沉积。我们发现，涂覆在金字塔形硅表面（ITO/Si）上的ITO可产生超亲水导电表面，其接触角约为0度，电阻率为3×10^(-4)Ω·cm。这些值高度依赖于溅射过程中的衬底温度。我们还发现，在带有ITO层的金字塔形硅表面上额外涂覆PTFE所制备的超疏水导电表面（PTFE/ITO/Si）的接触角几乎为160度，电阻率为3×10^(-4)Ω·cm，反射率低于9%。因此，这些工艺可用于制造具有可切换超亲水和超疏水表面的ITO薄膜的多功能特性。
