Tsai Hsin-Yi, Hsu Chih-Ning, Li Cheng-Ru, Lin Yu-Hsuan, Hsiao Wen-Tse, Huang Kuo-Cheng, Yeh J Andrew
Taiwan Instrument Research Institute, National Applied Research Laboratories, Hsinchu 300092, Taiwan.
Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 300092, Taiwan.
Micromachines (Basel). 2021 Jan 1;12(1):44. doi: 10.3390/mi12010044.
Indium tin oxide (ITO) is widely used as a substrate for fabricating chips because of its optical transparency, favorable chemical stability, and high electrical conductivity. However, the wettability of ITO surface is neutral (the contact angle was approximately 90°) or hydrophilic. For reagent transporting and manipulation in biochip application, the surface wettability of ITO-based chips was modified to the hydrophobic or nearly hydrophobic surface to enable their use with droplets. Due to the above demand, this study used a 355-nm ultraviolet laser to fabricate a comb microstructure on ITO glass to modify the surface wettability characteristics. All of the fabrication patterns with various line width and pitch, depth, and surface roughness were employed. Subsequently, the contact angle (CA) of droplets on the ITO glass was analyzed to examine wettability and electrical performance by using the different voltages applied to the electrode. The proposed approach can succeed in the fabrication of a biochip with suitable comb-microstructure by using the optimal operating voltage and time functions for the catch droplets on ITO glass for precision medicine application. The experiment results indicated that the CA of droplets under a volume of 20 μL on flat ITO substrate was approximately 92° ± 2°; furthermore, due to its lowest surface roughness, the pattern line width and pitch of 110 μm exhibited a smaller CA variation and more favorable spherical droplet morphology, with a side and front view CA of 83° ± 1° and 78.5° ± 2.5°, respectively, while a laser scanning speed of 750 mm/s was employed. Other line width and pitch, as well as scanning speed parameters, increased the surface roughness and resulted in the surface becoming hydrophilic. In addition, to prevent droplet morphology collapse, the droplet's electric operation voltage and driving time did not exceed 5 V and 20 s, respectively. With this method, the surface modification process can be employed to control the droplet's CA by adjusting the line width and pitch and the laser scanning speed, especially in the neutral or nearly hydrophobic surface for droplet transporting. This enables the production of a microfluidic chip with a surface that is both light transmittance and has favorable electrical conductivity. In addition, the shape of the microfluidic chip can be directly designed and fabricated using a laser direct writing system on ITO glass, obviating the use of a mask and complicated production processes in biosensing and biomanipulation applications.
氧化铟锡(ITO)因其光学透明性、良好的化学稳定性和高导电性,被广泛用作制造芯片的基板。然而,ITO表面的润湿性呈中性(接触角约为90°)或亲水性。在生物芯片应用中,为了进行试剂运输和操作,基于ITO的芯片的表面润湿性被改性为疏水或近疏水表面,以便能够与液滴配合使用。基于上述需求,本研究使用355纳米的紫外激光在ITO玻璃上制造梳状微结构,以改变表面润湿性特征。采用了所有具有不同线宽和间距、深度以及表面粗糙度的制造图案。随后,通过分析ITO玻璃上液滴的接触角(CA),利用施加到电极上的不同电压来检测润湿性和电性能。所提出的方法通过使用用于在ITO玻璃上捕获液滴的最佳工作电压和时间函数,能够成功制造出具有合适梳状微结构的生物芯片,用于精准医学应用。实验结果表明,在平坦的ITO基板上,体积为20微升的液滴的接触角约为92°±2°;此外,由于其表面粗糙度最低,线宽和间距为110微米的图案表现出较小的接触角变化和更良好的球形液滴形态,侧面和正面的接触角分别为83°±1°和78.5°±2.5°,此时采用的激光扫描速度为750毫米/秒。其他线宽和间距以及扫描速度参数增加了表面粗糙度,导致表面变为亲水性。此外,为了防止液滴形态坍塌,液滴的电操作电压和驱动时间分别不超过5伏和20秒。通过这种方法,表面改性过程可用于通过调整线宽和间距以及激光扫描速度来控制液滴的接触角,特别是在用于液滴运输的中性或近疏水表面。这使得能够生产出一种微流控芯片,其表面既具有透光性又具有良好的导电性。此外,微流控芯片的形状可以直接使用激光直写系统在ITO玻璃上进行设计和制造,从而避免在生物传感和生物操作应用中使用掩膜和复杂的生产工艺。