Ghadiry Mahdiar, Gholami Mehrdad, Kong Lai Choon, Yi Chong Wu, Ahmad Harith, Alias Yatima
Photonics Research Center, University of Malaya, Kuala Lumpur 50603, Malaysia.
Department of Chemistry, Faculty of Science, University of Malaya, Kuala Lumpur 50603, Malaysia.
Sensors (Basel). 2015 Dec 29;16(1):39. doi: 10.3390/s16010039.
An on-chip optical humidity sensor using Nano-anatase TiO₂ coating is presented here. The coating material was prepared so that the result is in solution form, making the fabrication process quick and simple. Then, the solution was effortlessly spin-coated on an SU8 straight channel waveguide. Investigating the sensitivity and performance (response time) of the device revealed a great linearity in the wide range (35% to 98%) of relative humidity (RH). In addition, a variation of more than 14 dB in transmitted optical power was observed, with a response time of only ~0.7 s. The effect of coating concentration and UV treatment was examined on the performance and repeatability of the sensor. Interesting observations were found, and the attributed mechanisms were described. In addition, the proposed sensor was extensively compared with other state-of-the-art proposed counterparts from the literature and remarkable advantages were found. Since a high sensitivity of ~0.21 dB/%RH and high dynamic performances were demonstrated, this sensor is proposed for use in biomedical applications.
本文介绍了一种使用纳米锐钛矿TiO₂涂层的片上光学湿度传感器。制备涂层材料使其呈溶液形式，从而使制造过程快速且简单。然后，将该溶液轻松旋涂在SU8直通道波导上。对该器件的灵敏度和性能（响应时间）进行研究后发现，在相对湿度（RH）的宽范围（35%至98%）内具有良好的线性度。此外，观察到传输光功率变化超过14 dB，响应时间仅约0.7秒。研究了涂层浓度和紫外线处理对传感器性能和重复性的影响。发现了有趣的现象，并描述了相关机制。此外，将所提出的传感器与文献中其他先进的同类传感器进行了广泛比较，发现了显著优势。由于该传感器具有约0.21 dB/%RH的高灵敏度和高动态性能，因此建议将其用于生物医学应用。
