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布置在薄硅掺杂金属/绝缘体/半导体/金属结构上的电等离子体2×2通道路由开关。

Electro-plasmonic 2 × 2 channel-routing switch arranged on a thin-Si-doped metal/insulator/semiconductor/metal structure.

作者信息

Moazzam Mostafa Keshavarz, Kaatuzian Hassan

出版信息

Appl Opt. 2016 Jan 20;55(3):565-75. doi: 10.1364/AO.55.000565.

Abstract

Plasmonics as a new field of chip-scale technology is the interesting substrate of this study to propose and numerically investigate a metal/insulator/semiconductor/metal (MISM)-structure 2×2 plasmonic routing switch. As a planar subwavelength arrangement, the presented design has two npn-doped side-coupled dual waveguides whose duty is to route the propagating surface plasmon polaritons through the device. Relying on the MISM structure, which has a MOS-like thin-film arrangement of typically 45 nm doped silicon covered by a layer of 8 nm thick HfO(2) gate insulator, the routing configuration is electrically addressed based on the carrier-induced plasma dispersion effects as an external electro-plasmonic switching control. Finite-element-method-conducted electromagnetic simulations are employed to evaluate the switch optical response at telecom wavelength of λ=1550  nm, due to which the balanced operation measure of extinction ratios larger than 10 dB and insertion losses of around -1.8  dB are obtained for both channels of CROSS and STRAIGHT. Compared with other photonic and plasmonic switching counterparts, this configuration, besides its potential for CMOS compatibility, can be utilized as a high-speed compact building block to sustain higher-speed, more miniaturized, and less consuming electro-optic routing/switching protocols toward complicated optical integrated circuits and systems.

摘要

作为芯片级技术的一个新领域,等离子体激元学是本研究提出并对金属/绝缘体/半导体/金属(MISM)结构的2×2等离子体激元路由开关进行数值研究的有趣基础。作为一种平面亚波长排列,所提出的设计有两个npn掺杂的侧耦合双波导,其作用是引导传播的表面等离子体激元通过该器件。基于MISM结构(具有类似MOS的薄膜排列,通常为45nm掺杂硅,上面覆盖一层8nm厚的HfO₂栅极绝缘体),路由配置基于载流子诱导的等离子体色散效应进行电寻址,作为一种外部电等离子体激元开关控制。采用有限元法进行电磁模拟,以评估在电信波长λ = 1550 nm下的开关光学响应,据此,对于交叉(CROSS)和直通(STRAIGHT)两个通道,均获得了消光比大于10 dB且插入损耗约为 -1.8 dB的平衡操作指标。与其他光子和等离子体激元开关相比,这种配置除了具有与CMOS兼容的潜力外,还可作为高速紧凑型构建模块,以支持针对复杂光集成电路和系统的更高速度、更小型化且功耗更低的电光路由/交换协议。

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